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微电子学中的远程温度传感:使用双中心磷光体的光学测温法。

Remote temperature sensing in microelectronics: optical thermometry using dual-center phosphors.

作者信息

Kurochkin Mikhail A, Mamonova Daria V, Medvedev Vassily A, Kolesnikov Evgenii Yu, Kolesnikov Ilya E

机构信息

St. Petersburg State University, Universitetskaya nab. 7-9, 199034, St. Petersburg, Russia.

Peter the Great St. Petersburg Polytechnic University, Polytechnicheskaya str. 29, 195251, St. Petersburg, Russia.

出版信息

Nanotechnology. 2024 Apr 30;35(29). doi: 10.1088/1361-6528/ad3d61.

DOI:10.1088/1361-6528/ad3d61
PMID:38604136
Abstract

Remote thermal sensing has emerged as a temperature detection technique for tasks in which standard contact thermometers cannot be used due to environment or dimension limitations. One of such challenging tasks is the measurement of temperature in microelectronics. Here, optical thermometry using co-doped and mixed dual-center GdO:Tb/Eusamples were realized. Ratiometric approach based on monitoring emission intensities of Tb(D-F) and Eu(D-F) transition provided sensing in the range of 30 °C-80 °C. Dispersion system type only slightly affected relative sensitivity, accuracy and precision. The applicability of phosphors synthesized to be utilized as remote optical thermometers for microelectronics has been proved with an example on a surface mount resistor and microcontroller.

摘要

远程热传感已成为一种温度检测技术,用于因环境或尺寸限制而无法使用标准接触式温度计的任务。此类具有挑战性的任务之一是微电子学中的温度测量。在此,实现了使用共掺杂和混合双中心GdO:Tb/Eu样品的光学测温法。基于监测Tb(D-F)和Eu(D-F)跃迁发射强度的比率法可在30℃至80℃范围内进行传感。色散系统类型仅对相对灵敏度、准确度和精密度有轻微影响。通过在表面贴装电阻器和微控制器上的一个示例,证明了合成的磷光体可用作微电子学远程光学温度计的适用性。

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