Seo Jungyoon, Li Shuangying, Tsogbayar Dashdendev, Hwang Taehoon, Park Jisu, Ko Eun, Park Su-Jeong, Yang Chanwoo, Lee Hwa Sung
Department of Materials Science and Chemical Engineering, Hanyang University, Ansan 15588, Republic of Korea.
BK21 FOUR ERICA-ACE Center, Hanyang University, Ansan 15588, Republic of Korea.
ACS Appl Mater Interfaces. 2024 May 1;16(17):22229-22237. doi: 10.1021/acsami.4c00868. Epub 2024 Apr 19.
A physical sensor with a sensing medium comprising multiparallel-connected (MPC) piezoresistive pathways in both the vertical and horizontal directions was developed to achieve improved sensing performance. The MPC sensing medium reduces the total resistance and offsets noise, offering enhanced signal stability and device reliability and providing a high-performance sensing platform. The signal change and gauge factor (GF) of the 3PW-5L strain sensor (comprising three lines and five layers of piezoresistive pathways horizontally and vertically, respectively) were, respectively, 5.9 and 4.7 times higher than those of the 1PW-1L sensor composed of a monosensing pathway; the hysteresis of the detected signal was also significantly reduced. The linearity of the detected signal increased from 0.912 for 1PW-1L to 0.995 for 3PW-5L, indicating a greater sensing reliability. The direction of the applied tensile strain was successfully detected using the MPC sensing medium with an orthogonal configuration. The MPC piezoresistive sensor composing vertically stacked piezoresistive pathways demonstrated excellent performance as a pressure sensor; the 3PW-5L pressure sensor afforded a GF of 0.121 ± 0.002 kPa with a linearity of 0.998 under an applied pressure ≥16.4 kPa. The MPC piezoresistive physical sensor offers a superior sensing performance and should contribute to the future development of wearable sensors and electronic devices.
开发了一种物理传感器，其传感介质在垂直和水平方向上均包含多并联连接（MPC）的压阻通路，以实现更好的传感性能。MPC传感介质降低了总电阻并抵消了噪声，提高了信号稳定性和器件可靠性，并提供了一个高性能的传感平台。3PW-5L应变传感器（分别由水平和垂直方向上的三层和五层压阻通路组成）的信号变化和应变系数（GF）分别比由单传感通路组成的1PW-1L传感器高5.9倍和4.7倍；检测信号的滞后也显著降低。检测信号的线性度从1PW-1L的0.912提高到3PW-5L的0.995，表明传感可靠性更高。使用具有正交配置的MPC传感介质成功检测到了施加拉伸应变的方向。由垂直堆叠的压阻通路组成的MPC压阻传感器作为压力传感器表现出优异的性能；在施加压力≥16.4 kPa的情况下，3PW-5L压力传感器的GF为0.121±0.002 kPa，线性度为0.998。MPC压阻物理传感器具有卓越的传感性能，应为可穿戴传感器和电子设备的未来发展做出贡献。
