Olaniyan I I, Schmitt S W, Albert J, Garcia Fernandez J, Marcelot C, Cours R, Deshpande V, Cherkashin N, Schamm-Chardon S, Kim D J, Dubourdieu C
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner Platz 1, D-14109 Berlin, Germany.
Freie Universität Berlin, Physical and Theoretical Chemistry, Arnimallee 22, D-14195 Berlin, Germany.
Nanotechnology. 2024 May 28;35(33). doi: 10.1088/1361-6528/ad4713.
The realization of perovskite oxide nanostructures with controlled shape and dimensions remains a challenge. Here, we investigate the use of helium and neon focused ion beam (FIB) milling in an ion microscope to fabricate BaTiOnanopillars of sub-500 nm in diameter starting from BaTiO(001) single crystals. Irradiation of BaTiOwith He ions induces the formation of nanobubbles inside the material, eventually leading to surface swelling and blistering. Ne-FIB is shown to be suitable for milling without inducing surface swelling. The resulting structures are defect-free single crystal nanopillars, which are enveloped, on the top and lateral sidewalls, by a point defect-rich crystalline region and an outer Ne-rich amorphous layer. The amorphous layer can be selectively etched by dipping in diluted HF. The geometry and beam-induced damage of the milled nanopillars depend strongly on the patterning parameters and can be well controlled. Ne ion milling is shown to be an effective method to rapidly prototype BaTiOcrystalline nanostructures.
实现具有可控形状和尺寸的钙钛矿氧化物纳米结构仍然是一项挑战。在此，我们研究了在离子显微镜中使用氦离子和氖离子聚焦离子束（FIB）铣削技术，从BaTiO(001)单晶开始制备直径小于500 nm的BaTiO纳米柱。用氦离子辐照BaTiO会在材料内部诱导形成纳米气泡，最终导致表面肿胀和起泡。结果表明，氖离子聚焦离子束（Ne-FIB）适用于铣削且不会引起表面肿胀。所得结构为无缺陷的单晶纳米柱，其顶部和侧壁被富含点缺陷的结晶区域和富含氖的外部非晶层包裹。通过浸入稀释的氢氟酸中可以选择性地蚀刻非晶层。铣削后的纳米柱的几何形状和束流诱导损伤在很大程度上取决于图案化参数，并且可以得到很好的控制。结果表明，氖离子铣削是一种快速制备BaTiO晶体纳米结构原型的有效方法。
