更正：高灵敏度晶圆级无转移石墨烯微机电系统电容式麦克风。
Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.
作者信息
Pezone Roberto, Anzinger Sebastian, Baglioni Gabriele, Wasisto Hutomo Suryo, Sarro Pasqualina M, Steeneken Peter G, Vollebregt Sten
机构信息
Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
Infineon Technologies AG, Am Campeon 1-15, Neubiberg, 85579 Germany.
出版信息
Microsyst Nanoeng. 2024 Jun 4;10:73. doi: 10.1038/s41378-024-00705-5. eCollection 2024.
Abstract
[This corrects the article DOI: 10.1038/s41378-024-00656-x.].
摘要
[本文更正了文章的数字对象标识符：10.1038/s41378-024-00656-x。]
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本文引用的文献
1
Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.高灵敏度晶圆级无转移石墨烯MEMS电容式麦克风。
Microsyst Nanoeng. 2024 Feb 21;10:27. doi: 10.1038/s41378-024-00656-x. eCollection 2024.
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