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基于微结构辅助的钙钛矿微激光阵列晶圆级制造。

Microstructure-Assisted Wafer-Scale Fabrication of Perovskite Microlaser Arrays.

作者信息

Tan Yike, Yang Liuli, Song Hao, Huang Ming, Huang Jianhua, Ali Wajid, Li Fubin, Li Ziwei

机构信息

Hunan Institute of Optoelectronic Integration, College of Materials Science and Engineering, Hunan University, Changsha, Hunan, 410082, China.

出版信息

Small. 2024 Sep;20(38):e2401596. doi: 10.1002/smll.202401596. Epub 2024 Jun 18.

Abstract

All inorganic lead halide perovskites exhibit fascinating optical and optoelectronic characteristics for on-chip lasing, but the lack of precise control of wafer-scale fabrication for perovskite microstructure arrays restricts their potential applications in on-chip-integrated devices. In this work, a microstructure-template assisted crystallization method is demonstrated via a designed chemical vapor deposition process, achieving the controllable fabrication of homogeneous perovskite micro-hemispheroid (PeMH) arrays spanning the entire surface area of a 4-inch wafer. Benefiting from the low-loss whispering gallery resonance and plasmon-enhanced light-matter interactions in well-confined hybrid cavities, this CsPbX/Ag (X = Cl, Br) plasmonic microlasers exhibit quite low thresholds below 10 µJ cm. Interestingly, these thresholds can be efficiently modulated through the manipulation of plasmonic resonance and electromagnetic field mode in PeMHs owning various diameters. This strategy not only provides a valuable methodology for the large-scale fabrication of perovskite microstructures but also endorses the potential of all-inorganic perovskite nanostructures as promising candidates for on-chip-integrated light sources.

摘要

所有无机铅卤化物钙钛矿都展现出用于片上激光的迷人光学和光电特性,但对于钙钛矿微结构阵列缺乏对晶圆级制造的精确控制限制了它们在片上集成器件中的潜在应用。在这项工作中,通过设计的化学气相沉积工艺展示了一种微结构模板辅助结晶方法,实现了跨越4英寸晶圆整个表面积的均匀钙钛矿微半球体(PeMH)阵列的可控制造。受益于在良好限制的混合腔中的低损耗回音壁共振和等离子体增强的光-物质相互作用,这种CsPbX/Ag(X = Cl、Br)等离子体微激光器表现出低于10 μJ cm的相当低的阈值。有趣的是,通过操纵具有不同直径的PeMH中的等离子体共振和电磁场模式,可以有效地调制这些阈值。该策略不仅为钙钛矿微结构的大规模制造提供了一种有价值的方法,还认可了全无机钙钛矿纳米结构作为片上集成光源有前景候选者的潜力。

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