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探索用于下一代存储技术的二维和三维铁电与非门存储阵列中的干扰特性。

Exploring Disturb Characteristics in 2D and 3D Ferroelectric NAND Memory Arrays for Next-Generation Memory Technology.

作者信息

Kim Ik-Jyae, Choi Jiwoung, Lee Jang-Sik

机构信息

Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Korea.

出版信息

ACS Appl Mater Interfaces. 2024 Jul 3;16(26):33763-33770. doi: 10.1021/acsami.4c03785. Epub 2024 Jun 20.

Abstract

Ferroelectric transistors are considered promising for next-generation 3D NAND technology due to their lower power consumption and faster operation compared to conventional charge-trap flash memories. However, ensuring their suitability for such applications requires a thorough investigation of array-scale reliability. This study specifically examines the suitability of hafnia-based ferroelectric transistors for advanced 3D NAND applications, with a specific focus on establishing a disturb-free voltage scheme to ensure the reliability of ferroelectric transistors within the array. Our key finding highlights the crucial role of optimal pass voltage in achieving disturb-free operation in both 2D and 3D ferroelectric NAND arrays. Additionally, the study indicates that read disturb remains negligible when an appropriate read voltage is applied. These insights provide a practical strategy for achieving reliable operation in 2D and 3D ferroelectric NAND, highlighting the potential of hafnia-based ferroelectric materials to meet the evolving requirements of high-density and reliable NAND flash memory applications.

摘要

与传统的电荷陷阱闪存相比,铁电晶体管因其较低的功耗和更快的运行速度而被认为在下一代3D NAND技术中具有潜力。然而,要确保它们适用于此类应用,需要对阵列规模的可靠性进行全面研究。本研究专门考察了基于氧化铪的铁电晶体管在先进3D NAND应用中的适用性,特别关注建立一种无干扰电压方案,以确保阵列中铁电晶体管的可靠性。我们的关键发现突出了最佳通过电压在二维和三维铁电NAND阵列中实现无干扰操作的关键作用。此外,该研究表明,当施加适当的读取电压时,读取干扰仍然可以忽略不计。这些见解为在二维和三维铁电NAND中实现可靠操作提供了一种实用策略,突出了基于氧化铪的铁电材料满足高密度和可靠NAND闪存应用不断发展的需求的潜力。

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