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用于生理健康与行为监测的柔性多相钛酸钡压电传感器的研制

[Development of flexible multi-phase barium titanate piezoelectric sensor for physiological health and action behavior monitoring].

作者信息

Zeng Qinghao, Han Shulang, Liang Ying, Tian Xiaobao

机构信息

College of Architecture & Environmental Engineering, Sichuan University, Chengdu 610065, P. R. China.

College of Mechanical Engineering, Sichuan University, Chengdu 610065, P. R. China.

出版信息

Sheng Wu Yi Xue Gong Cheng Xue Za Zhi. 2024 Jun 25;41(3):421-429. doi: 10.7507/1001-5515.202404016.

Abstract

Self-powered wearable piezoelectric sensing devices demand flexibility and high voltage electrical properties to meet personalized health and safety management needs. Aiming at the characteristics of piezoceramics with high piezoelectricity and low flexibility, this study designs a high-performance piezoelectric sensor based on multi-phase barium titanate (BTO) flexible piezoceramic film, namely multi-phase BTO sensor. The substrate-less self-supported multi-phase BTO films had excellent flexibility and could be bent 180° at a thickness of 33 μm, and exhibited good bending fatigue resistance in 1 × 10 bending cycles at a thickness of 5 μm. The prepared multi-phase BTO sensor could maintain good piezoelectric stability after 1.2 × 10 piezoelectric cycle tests. Based on the flexibility, high piezoelectricity, wearability, portability and battery-free self-powered characteristics of this sensor, the developed smart mask could monitor the respiratory signals of different frequencies and amplitudes in real time. In addition, by mounting the sensor on the hand or shoulder, different gestures and arm movements could also be detected. In summary, the multi-phase BTO sensor developed in this paper is expected to develop convenient and efficient wearable sensing devices for physiological health and behavioral activity monitoring applications.

摘要

自供电可穿戴压电传感设备需要具备灵活性和高电压电学性能,以满足个性化健康与安全管理需求。针对压电陶瓷压电性高但柔韧性低的特点,本研究设计了一种基于多相钛酸钡(BTO)柔性压电陶瓷薄膜的高性能压电传感器,即多相BTO传感器。无基底自支撑多相BTO薄膜具有优异的柔韧性,在厚度为33μm时可弯曲180°,在厚度为5μm时,在1×10次弯曲循环中表现出良好的抗弯曲疲劳性能。制备的多相BTO传感器在1.2×10次压电循环测试后仍能保持良好的压电稳定性。基于该传感器的柔韧性、高压电性、可穿戴性、便携性和无电池自供电特性,所开发的智能口罩能够实时监测不同频率和幅度的呼吸信号。此外,通过将传感器安装在手部或肩部,还能检测到不同的手势和手臂动作。综上所述,本文所开发的多相BTO传感器有望为生理健康和行为活动监测应用开发出方便高效的可穿戴传感设备。

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