Han Zhen-Hua, Wang Qi-Bo, Xu Qin-Qin, Qiu Xin-Hui, Cheng Tong, Jiao Dong-Sheng, Yin Jian-Zhong
School of Chemical Engineering, Dalian University of Technology, 2 Ling Gong Road, 116024, Dalian, China.
The Second Hospital of Dalian Medical University, 467 Zhong Shan Road, 116021, Dalian, China.
Nanoscale. 2024 Aug 7;16(30):14402-14417. doi: 10.1039/d4nr01772b.
Sulfuration reactions dominate the synthesis of transition-metal dichalcogenides chemical vapor deposition. A neglected critical issue is the evolution of crystal domain morphology and growth models caused by boundary layer development. In this study, we propose two growth models within a laminar flow field to investigate the kinetic mechanism of uniformly grown MoS. We used supercritical fluid pre-deposition to obtain a well-distributed and low-crystallinity Mo precursor on the surface of a substrate to avoid non-stoichiometric supply in sulfuration. The development of the boundary layer was suppressed through mainstream force by adjusting the substrate slope angle. For growth within the underdeveloped laminar boundary layer, monolayer MoS with a size of 50 μm uniformly distributed on the full substrate with = 85% (relative change in boundary layer thickness). Moreover, the growth constrained by surface chemical reactions tended to promote spatially uniform growth. However, within the fully developed laminar flow, the crystal domains preferentially grew vertically, which was attributed to the excessive crystal growth rate (). Our results provide new insights into the controllable preparation of two-dimensional materials.
硫化反应在过渡金属二硫属化物化学气相沉积合成中占主导地位。一个被忽视的关键问题是边界层发展所导致的晶畴形态演变和生长模型。在本研究中,我们在层流场中提出了两种生长模型,以研究均匀生长的MoS的动力学机制。我们使用超临界流体预沉积在衬底表面获得分布良好且结晶度低的Mo前驱体,以避免硫化过程中的非化学计量供应。通过调整衬底倾斜角度,利用主流力抑制边界层的发展。对于在欠发达层流边界层内的生长,尺寸为50μm的单层MoS以85%(边界层厚度相对变化)均匀分布在整个衬底上。此外,受表面化学反应限制的生长倾向于促进空间均匀生长。然而,在充分发展的层流中,晶畴优先垂直生长,这归因于过高的晶体生长速率()。我们的结果为二维材料的可控制备提供了新的见解。