• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

通过注入能量范围为5-6兆电子伏的氧离子和氮离子微束在派热克斯玻璃和离子交换玻璃中制造准正弦表面起伏光学透射光栅。

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5-6 MeV Energy Range.

作者信息

Bányász István, Rajta István, Havránek Vladimír, Pujol María Cinta, Bazsó Gábor, Kármán György, Nagy Gyula

机构信息

HUN-REN Wigner Research Centre for Physics, P.O. Box 49, H-1525 Budapest, Hungary.

Institute of Physics and Electrical Engineering, University of Miskolc, 3515 Miskolc, Hungary.

出版信息

ACS Omega. 2024 Jul 4;9(28):30415-30424. doi: 10.1021/acsomega.4c01695. eCollection 2024 Jul 16.

DOI:10.1021/acsomega.4c01695
PMID:39035902
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11256291/
Abstract

A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5-6 MeV energy was devised and demonstrated. Gratings with a 30 μm grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.

摘要

设计并演示了一种利用能量为5-6 MeV的中质量离子微束在玻璃中制造具有准正弦轮廓的高衍射效率光学透射光栅的方法。制造出了光栅常数为30μm的光栅，并通过干涉显微镜和微轮廓仪对其进行了表征。发现所获得的光栅表面轮廓为准正弦形，振幅高达265 nm。在派热克斯玻璃和IOG玻璃中测得的最高一阶衍射效率均约为26%。这种光栅可作为集成光学和光子集成电路中的耦合元件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/a17daad770b8/ao4c01695_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/2a75d65ab650/ao4c01695_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/dbebf50005c8/ao4c01695_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/c30a91e4b33c/ao4c01695_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/6109637be453/ao4c01695_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/c9a52f6c2ba9/ao4c01695_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/bff95477c789/ao4c01695_0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/5ee2cbdc26f2/ao4c01695_0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/a17daad770b8/ao4c01695_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/2a75d65ab650/ao4c01695_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/dbebf50005c8/ao4c01695_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/c30a91e4b33c/ao4c01695_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/6109637be453/ao4c01695_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/c9a52f6c2ba9/ao4c01695_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/bff95477c789/ao4c01695_0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/5ee2cbdc26f2/ao4c01695_0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4bf7/11256291/a17daad770b8/ao4c01695_0008.jpg

相似文献

1
Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5-6 MeV Energy Range.通过注入能量范围为5-6兆电子伏的氧离子和氮离子微束在派热克斯玻璃和离子交换玻璃中制造准正弦表面起伏光学透射光栅。
ACS Omega. 2024 Jul 4;9(28):30415-30424. doi: 10.1021/acsomega.4c01695. eCollection 2024 Jul 16.
2
Comparative analysis for different designs of two-dimensional binary sinusoidal transmission gratings.二维二元正弦传输光栅不同设计的对比分析
Appl Opt. 2019 Sep 20;58(27):7397-7403. doi: 10.1364/AO.58.007397.
3
Single-step UV recording of sinusoidal surface gratings in hybrid solgel glasses.
Appl Opt. 1999 Nov 10;38(32):6744-8. doi: 10.1364/ao.38.006744.
4
Self-processing solgel material for one-step fabrication of micrometer-period sinusoidal phase gratings using the Lloyd's mirror scheme.用于使用劳埃德镜方案一步制造微米周期正弦相位光栅的自加工溶胶-凝胶材料。
Opt Lett. 2005 Oct 15;30(20):2772-4. doi: 10.1364/ol.30.002772.
5
Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror.用于近红外扫描光栅微镜的硅闪耀光栅的设计与制造
Micromachines (Basel). 2022 Jun 25;13(7):1000. doi: 10.3390/mi13071000.
6
Design and fabrication of diffraction grating with optimized efficiency for transient grating spectroscopy.用于瞬态光栅光谱学的高效率衍射光栅的设计与制作。
Rev Sci Instrum. 2022 Dec 1;93(12):125112. doi: 10.1063/5.0116176.
7
High-efficiency diffraction gratings for EUV and soft x-rays using spin-on-carbon underlayers.使用旋涂碳底层的用于极紫外和软X射线的高效衍射光栅。
Nanotechnology. 2021 Nov 15;33(6). doi: 10.1088/1361-6528/ac328b.
8
Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands.软X射线和极紫外波段中200纳米周期临界角透射光栅的衍射效率
Appl Opt. 2011 Apr 1;50(10):1364-73. doi: 10.1364/AO.50.001364.
9
Optimization of nonbinary slanted surface-relief gratings as high-efficiency broadband couplers for light guides.非二元倾斜表面浮雕光栅作为光波导高效宽带耦合器的优化
Appl Opt. 2010 Oct 1;49(28):5454-64. doi: 10.1364/AO.49.005454.
10
Polarization dependence of the formation of surface relief gratings in azobenzene-containing molecular glasses.含偶氮苯分子玻璃中表面起伏光栅形成的偏振依赖性
J Phys Chem B. 2009 Mar 19;113(11):3379-84. doi: 10.1021/jp809151x.

引用本文的文献

1
Direct Writing of Quasi-Sinusoidal and Blazed Surface Relief Optical Transmission Gratings in BiGeO, Er: LiNbO and Er: Fe: LiNbO Crystals by Nitrogen Ion Microbeams of 5 MeV and 10.5 MeV Energy.利用能量为5 MeV和10.5 MeV的氮离子微束在BiGeO、Er:LiNbO和Er:Fe:LiNbO晶体中直接写入准正弦和闪耀表面浮雕光学透射光栅。
Sensors (Basel). 2025 Jan 29;25(3):804. doi: 10.3390/s25030804.

本文引用的文献

1
Driving Third-Order Optical Nonlinearities in Photoluminescent Si Nanoparticles by Nitrogen Co-Implantation in a Silica Matrix.通过在二氧化硅基质中氮共注入驱动光致发光硅纳米颗粒中的三阶光学非线性
Materials (Basel). 2022 Aug 18;15(16):5670. doi: 10.3390/ma15165670.
2
Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications.用于新兴应用的锗离子注入光子器件及退火处理
Micromachines (Basel). 2022 Feb 12;13(2):291. doi: 10.3390/mi13020291.
3
Surface-relief and polarization gratings for solar concentrators.用于太阳能聚光器的表面浮雕光栅和偏振光栅。
Opt Express. 2011 Aug 1;19(16):15127-42. doi: 10.1364/OE.19.015127.
4
Ion beam micromachining of integrated optics components.
Appl Opt. 1973 Mar 1;12(3):455-9. doi: 10.1364/AO.12.000455.
5
Viscoelastic model for the plastic flow of amorphous solids under energetic ion bombardment.高能离子轰击下非晶态固体塑性流动的粘弹性模型。
Phys Rev Lett. 1995 Jun 19;74(25):5072-5075. doi: 10.1103/PhysRevLett.74.5072.