通过注入能量范围为5-6兆电子伏的氧离子和氮离子微束在派热克斯玻璃和离子交换玻璃中制造准正弦表面起伏光学透射光栅。

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5-6 MeV Energy Range.

作者信息

Bányász István, Rajta István, Havránek Vladimír, Pujol María Cinta, Bazsó Gábor, Kármán György, Nagy Gyula

机构信息

HUN-REN Wigner Research Centre for Physics, P.O. Box 49, H-1525 Budapest, Hungary.

Institute of Physics and Electrical Engineering, University of Miskolc, 3515 Miskolc, Hungary.

出版信息

ACS Omega. 2024 Jul 4;9(28):30415-30424. doi: 10.1021/acsomega.4c01695. eCollection 2024 Jul 16.

DOI:10.1021/acsomega.4c01695

PMID:39035902

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11256291/

Abstract

A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5-6 MeV energy was devised and demonstrated. Gratings with a 30 μm grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.

摘要

设计并演示了一种利用能量为5-6 MeV的中质量离子微束在玻璃中制造具有准正弦轮廓的高衍射效率光学透射光栅的方法。制造出了光栅常数为30μm的光栅，并通过干涉显微镜和微轮廓仪对其进行了表征。发现所获得的光栅表面轮廓为准正弦形，振幅高达265 nm。在派热克斯玻璃和IOG玻璃中测得的最高一阶衍射效率均约为26%。这种光栅可作为集成光学和光子集成电路中的耦合元件。