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大规模单元微透镜阵列高温成型中玻璃的变形行为研究

Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays.

作者信息

Wang Gang, Zhou Tianfeng, Sun Xiuwen, Gao Liheng, Yao Xiaoqiang, Zhao Bin, Guo Weijia

机构信息

School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China.

Chongqing Innovation Center, Beijing Institute of Technology, Chongqing 401120, China.

出版信息

ACS Appl Mater Interfaces. 2024 Aug 14;16(32):43038-43048. doi: 10.1021/acsami.4c10406. Epub 2024 Jul 31.

DOI:10.1021/acsami.4c10406
PMID:39082273
Abstract

Microlens arrays (MLAs) with a large number of units, known as massive unit microlens arrays (MUMLAs), are increasingly sought after for their ability to achieve high-power conversion in infrared optical systems. Precision glass molding (PGM) is considered the ideal manufacturing method for MUMLAs. However, the stress distribution and deformation behavior during molding lack detailed understanding, resulting in poor filling consistency and forming accuracy. Consequently, this leads to inconsistent diffuse spot size and irradiance in MUMLAs. This study aims to comprehensively analyze the glass filling behavior during the molding process of MUMLAs using both simulation and experimental approaches. It explains the impact of glass filling behavior and consistency on the optical performance of MUMLAs. Additionally, the effects of molding parameters on the filling consistency of the lenses are investigated. By optimizing these parameters, a high-consistency 128 × 128 MUMLA is fabricated.

摘要

具有大量单元的微透镜阵列(MLA),即所谓的大规模单元微透镜阵列(MUMLA),因其在红外光学系统中实现高功率转换的能力而越来越受到追捧。精密玻璃模塑(PGM)被认为是制造MUMLA的理想方法。然而,在模塑过程中的应力分布和变形行为缺乏详细了解,导致填充一致性和成型精度较差。因此,这会导致MUMLA中的漫射光斑尺寸和辐照度不一致。本研究旨在使用模拟和实验方法全面分析MUMLA模塑过程中的玻璃填充行为。它解释了玻璃填充行为和一致性对MUMLA光学性能的影响。此外,还研究了成型参数对透镜填充一致性的影响。通过优化这些参数,制造出了高一致性的128×128 MUMLA。

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