Gao Jing, Chien Yu-Chieh, Li Lingqi, Lee Hock Koon, Samanta Subhranu, Varghese Binni, Xiang Heng, Li Minghua, Liu Chen, Zhu Yao, Chen Li, Ang Kah-Wee
Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117583, Singapore.
Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Singapore, 138634, Singapore.
Small. 2024 Nov;20(47):e2404711. doi: 10.1002/smll.202404711. Epub 2024 Aug 16.
Aluminum Scandium Nitride (AlScN) has received attention for its exceptional ferroelectric properties, whereas the fundamental mechanism determining its dynamic response and reliability remains elusive. In this work, an unreported nucleation-based polarization switching mechanism in AlScN (AlScN) is unveiled, driven by its intrinsic ferroelectricity rooted in the ionic displacement. Fast polarization switching, characterized by a remarkably low characteristic time of 0.00183 ps, is captured, and effectively simulated using a nucleation-limited switching (NLS) model, where the profound effect of defects on the nucleation and domain propagation is systematically studied. These findings are further integrated into Monte Carlo simulations to unravel the influence of the activation energy for ferroelectric switching on the distributions of switching thresholds. The long-term reliability of devices is also confirmed by time-dependent dielectric breakdown (TDDB) measurements, and the effect of thickness scaling is discussed. Ferroelectric field-effect transistors (FeFETs) are demonstrated through the integration of AlScN and 2D MoS channel, where biological synaptic functions can be emulated with optimized operation voltage. The artificial neural network built from AlScN-based FeFETs achieves 93.8% recognition accuracy of handwritten digits, demonstrating the potential of ferroelectric AlScN in future neuromorphic computing applications.
氮化铝钪(AlScN)因其优异的铁电性能而受到关注,然而,决定其动态响应和可靠性的基本机制仍然难以捉摸。在这项工作中,揭示了一种未报道的基于成核的AlScN极化切换机制,该机制由其源于离子位移的固有铁电性驱动。捕捉到了以0.00183 ps的极低特征时间为特征的快速极化切换,并使用成核限制切换(NLS)模型进行了有效模拟,其中系统地研究了缺陷对成核和畴传播的深远影响。这些发现进一步整合到蒙特卡罗模拟中,以揭示铁电切换激活能对切换阈值分布的影响。通过时间相关介电击穿(TDDB)测量也证实了器件的长期可靠性,并讨论了厚度缩放的影响。通过集成AlScN和二维MoS沟道展示了铁电场效应晶体管(FeFET),其中可以通过优化工作电压来模拟生物突触功能。由基于AlScN的FeFET构建的人工神经网络实现了93.8%的手写数字识别准确率,证明了铁电AlScN在未来神经形态计算应用中的潜力。