Nakamura Atsushi, Shiba Shunpei, Hosomi Kei, Ono Atsushi, Kawata Yoshimasa, Inami Wataru
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan.
Graduate School of Integrated Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan.
Microscopy (Oxf). 2025 Jan 30;74(1):71-77. doi: 10.1093/jmicro/dfae043.
We have demonstrated localized surface plasmon (LSP)-enhanced cathodoluminescence (CL) from an atomic layer deposition-grown Al2O3/ZnO/Al2O3 heterostructure to develop a bright nanometer-scale light source for an electron beam excitation-assisted optical microscope. Three types of metals, Ag, Al and Au, were compared, and an 181-fold enhancement of CL emission was achieved with Ag nanoparticles, with the plasmon resonance wavelength close to the emission wavelength energy of ZnO. The enhanced emission is plausibly attributed to LSP/exciton coupling. However, it is also attributed to an increase in coupling efficiency with penetration depth and also to an increase in light extraction efficiency by grading the refractive indices at the heterostructure.
我们已经证明了从原子层沉积生长的Al2O3/ZnO/Al2O3异质结构中产生的局域表面等离子体（LSP）增强阴极发光（CL），以开发用于电子束激发辅助光学显微镜的明亮纳米级光源。比较了三种金属Ag、Al和Au，使用Ag纳米颗粒实现了CL发射增强181倍，等离子体共振波长接近ZnO的发射波长能量。增强的发射可能归因于LSP/激子耦合。然而，这也归因于耦合效率随穿透深度的增加，以及通过在异质结构处渐变折射率来提高光提取效率。
