Wang Zhehang, Lan Kuibo, Wang Zhi, Wei Junqing, Chen Ruibing, Qin Guoxuan
School of Microelectronics, Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin University, Tianjin, 300072, PR China.
School of Integrated Circuit Science and Engineering, Tianjin Key Laboratory of Film Electronic & Communication Devices, Tianjin University of Technology, Tianjin, 300384, PR China.
Talanta. 2025 Jan 1;282:127086. doi: 10.1016/j.talanta.2024.127086. Epub 2024 Oct 21.
For industrial production and disease diagnosis, real-time detection of low concentrations of NH is crucial, necessitating a gas-sensitive sensor compatible with integrated processes and exhibiting excellent performance. Herein, we employed wet etching and rapid in-situ polymerization on silicon nanowire substrates to grow polyaniline fibers, thereby fabricating NH gas sensors with p-p heterojunction and three-dimensional network structures. Characterization and gas sensing performance testing were conducted. The results demonstrate the outstanding NH detection capabilities of the sensor, providing stable responses down to concentrations as low as 1 ppb, which indicates its LOD is one to two orders of magnitude lower than current similar products. It also exhibits verified selectivity and long-term reliability. The excellent sensing performance is attributed to the high surface area from the silicon nanowire structure and efficient synergy of p-p heterojunction. Additionally, the influence of doping types of the substrates and annealing process were explored. This work serves as a reference for the design of silicon-based gas sensors with high sensitivity, low detection limits, and extended operational lifetimes, suitable for deployment in commercial integrated monitoring systems.
对于工业生产和疾病诊断而言,低浓度NH的实时检测至关重要,这就需要一种与集成工艺兼容且性能优异的气敏传感器。在此,我们在硅纳米线基底上采用湿法蚀刻和快速原位聚合来生长聚苯胺纤维,从而制备出具有p-p异质结和三维网络结构的NH气体传感器。进行了表征和气敏性能测试。结果表明该传感器具有出色的NH检测能力,对低至1 ppb的浓度也能提供稳定响应,这表明其检测限比当前类似产品低一到两个数量级。它还表现出经证实的选择性和长期可靠性。优异的传感性能归因于硅纳米线结构的高表面积以及p-p异质结的有效协同作用。此外,还探讨了基底掺杂类型和退火工艺的影响。这项工作为设计具有高灵敏度、低检测限和长使用寿命的硅基气体传感器提供了参考,适用于商业集成监测系统。