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180纳米互补金属氧化物半导体工艺中的无线人工机械感受器

A Wireless Artificial Mechanoreceptor in 180-nm CMOS.

作者信息

Hao Han, Du Lin, Richardson Andrew G, Lucas Timothy H, Allen Mark G, Van der Spiegel Jan, Aflatouni Firooz

机构信息

Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA 19104 USA.

Department of Neurosurgery, University of Pennsylvania, Philadelphia, PA 19104 USA.

出版信息

IEEE Trans Microw Theory Tech. 2021 Jun;69(6):2907-2920. doi: 10.1109/tmtt.2021.3072398. Epub 2021 Apr 22.

Abstract

This article presents an implantable low-power wireless integrated system for tactile sensing applications. The reported ASIC utilizes a low-loss magnetic human body communication channel for both wireless power and data transfer. The chip is hybrid-integrated with an in-house fabricated MEMS capacitive force sensor to form an implantable artificial mechanoreceptor. An on-chip correlated double sampling capacitance to time converter consumes 750nW from a 1.2V on-chip regulated supply, achieving a 2.0fF resolution for an input capacitance of 14pF and a FoM of 49 fJ/c-s while occupying an area of only 0.04 mm. The capacitance to time converter has a time-multiplexed mode to interface with 4 input capacitors. Wireless power management feedback is utilized to ensure robust operation in the presence of hand gesture changes and process-voltage-temperature variations. The on-chip data transmitter can operate in on-off keying or frequency-shift keying modulation formats, where it consumes only 7.8 in the on-off keying mode. The 1.62mm chip is fabricated in a standard 180nm CMOS process and consumes 110.3 .

摘要

本文介绍了一种用于触觉传感应用的植入式低功耗无线集成系统。所报道的专用集成电路(ASIC)利用低损耗磁人体通信通道进行无线电力和数据传输。该芯片与内部制造的微机电系统(MEMS)电容式力传感器混合集成,形成一个植入式人工机械感受器。片上相关双采样电容-时间转换器从1.2V片上稳压电源消耗750nW功率,对于14pF的输入电容实现2.0fF分辨率,优值为49fJ/c-s,同时仅占用0.04mm²的面积。电容-时间转换器具有时分复用模式,可与4个输入电容接口。利用无线电源管理反馈来确保在存在手势变化和工艺-电压-温度变化的情况下稳健运行。片上数据发射器可以工作在开关键控或频移键控调制格式,其中在开关键控模式下仅消耗7.8nW。该1.62mm²的芯片采用标准180nm互补金属氧化物半导体(CMOS)工艺制造,功耗为110.3nW。

相似文献

1
A Wireless Artificial Mechanoreceptor in 180-nm CMOS.180纳米互补金属氧化物半导体工艺中的无线人工机械感受器
IEEE Trans Microw Theory Tech. 2021 Jun;69(6):2907-2920. doi: 10.1109/tmtt.2021.3072398. Epub 2021 Apr 22.

本文引用的文献

1
A Trimodal Wireless Implantable Neural Interface System-on-Chip.一种三模态无线可植入神经接口系统级芯片。
IEEE Trans Biomed Circuits Syst. 2020 Dec;14(6):1207-1217. doi: 10.1109/TBCAS.2020.3037452. Epub 2020 Dec 31.
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Intracortical microstimulation of human somatosensory cortex.人类体感皮层的皮层内微刺激。
Sci Transl Med. 2016 Oct 19;8(361):361ra141. doi: 10.1126/scitranslmed.aaf8083. Epub 2016 Oct 13.
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Magnetic human body communication.磁性人体通信
Annu Int Conf IEEE Eng Med Biol Soc. 2015;2015:1841-4. doi: 10.1109/EMBC.2015.7318739.
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Behavioral demonstration of a somatosensory neuroprosthesis.躯体感觉神经假肢的行为演示。
IEEE Trans Neural Syst Rehabil Eng. 2013 May;21(3):500-7. doi: 10.1109/TNSRE.2013.2244616. Epub 2013 Mar 6.

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