Tan Renjie, Xia Yong, Han Xiangguang, Huang Linya, Gao Wendi, Jia Chen, Yang Ping, Lin Qijing, Ding Shujiang, Wang Chenying, Zhao Libo
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, 710049, Xi'an, China.
School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.
Microsyst Nanoeng. 2024 Nov 29;10(1):180. doi: 10.1038/s41378-024-00831-0.
Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing, minimally invasive surgery, and other narrow operating spaces, where currently available commercial sensors cannot meet the requirements because of their large size. In this study, a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3 × 9.3 × 0.98 mm was designed, fabricated, and tested. A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams, comb capacitors, and parallel capacitors was employed. A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk. The proposed S-shaped beams achieved a large measurement range through stress optimization. The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses. The test results show that the proposed sensing chip can detect six-axis force/torque separately, with all crosstalk errors less than 2.59%FS. Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm, respectively. The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm) for force and torque detection, respectively.
小型六轴力/扭矩传感器在机器人触觉传感、微创手术和其他狭窄操作空间中具有潜在应用，而目前市场上的商用传感器由于尺寸较大，无法满足这些应用的需求。在本研究中，设计、制造并测试了一种尺寸为9.3×9.3×0.98 mm的硅基电容式六轴力/扭矩传感芯片。采用了一种夹心去耦结构，该结构具有S形梁、梳状电容器和平行电容器的对称分层排列。推导了一种考虑偏心和非线性效应的去耦理论，以实现低轴向串扰。所提出的S形梁通过应力优化实现了较大的测量范围。耦合多物理场有限元模拟结果与理论分析结果吻合良好。测试结果表明，所提出的传感芯片能够分别检测六轴力/扭矩，所有串扰误差均小于2.59%FS。其力和扭矩测量范围分别可达2.5 N和12.5 N·mm。该传感芯片在力和扭矩检测方面还分别具有0.52 pF/N和0.27 pF/(N·mm)的高灵敏度。
