Ling Jinzhong, Wang Yucheng, Guo Jinkun, Liu Xin, Wang Xiaorui
School of Optoelectronic Engineering, Xidian University, Xi'an 710071, China.
Nanomaterials (Basel). 2024 Dec 9;14(23):1974. doi: 10.3390/nano14231974.
Compared with traditional far-field objective lenses, microparticle lenses have a distinct advantage of nonobservance of the diffraction limit, which has attracted extensive attention for its application in subwavelength photolithography and super-resolution imaging. In this article, a complete simulation model for a microparticle lens assisted microscopic imaging system was built to analyze the imaging characteristics of any shape of microparticle lens. With this model, we simulated the resolution of a conventional objective lens, a microsphere lens and a hollow microsphere lens, which verified the correctness of our simulation model and demonstrated the super-resolution imaging ability of microsphere lenses. Secondly, the focusing and imaging characteristics of four typical microparticle lenses are illustrated, and how the focal spot affects imaging resolution and imaging quality is analyzed. Upon this conclusion, we reformed and upgraded the microsphere lens with several parameters for smaller focal spots and higher imaging resolution. Finally, three types of microparticle lenses were designed through the optimized parameters and their focusing and imaging characteristics were demonstrated with a minimum FWHM of 140 nm at the focal plane and a highest imaging resolution around 70 nm (~λ/6). Our work opens up a new perspective of super-resolution imaging with near-field microparticle lens.
与传统远场物镜相比，微粒透镜具有不受衍射极限限制的显著优势，这使其在亚波长光刻和超分辨率成像中的应用备受关注。本文构建了一个用于微粒透镜辅助显微成像系统的完整仿真模型，以分析任意形状微粒透镜的成像特性。利用该模型，我们模拟了传统物镜、微球透镜和空心微球透镜的分辨率，验证了仿真模型的正确性，并展示了微球透镜的超分辨率成像能力。其次，阐述了四种典型微粒透镜的聚焦和成像特性，并分析了焦斑如何影响成像分辨率和成像质量。基于这一结论，我们对微球透镜的几个参数进行了改进和优化，以获得更小的焦斑和更高的成像分辨率。最后，通过优化参数设计了三种类型的微粒透镜，并展示了它们的聚焦和成像特性，焦平面处的半高宽最小为140 nm，最高成像分辨率约为70 nm（~λ/6）。我们的工作为近场微粒透镜超分辨率成像开辟了新的视角。
