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一种关于金属诱导非晶态锗和硅薄膜结晶的简单唯象学解释。

A simple phenomenological account for the metal-induced crystallization of amorphous Ge and Si films.

作者信息

Zanatta A R

机构信息

Institute of Physics, University of São Paulo, São Carlos, 13560-590, SP, Brazil.

出版信息

Sci Rep. 2024 Dec 28;14(1):31009. doi: 10.1038/s41598-024-81981-z.

Abstract

When combined with certain metal species, films of amorphous Ge or Si can have their typical crystallization temperatures decreased, by a factor of three or four, down to ~ 200 °C. The phenomenon is called metal-induced crystallization (MIC) and, since its first observation in the late 1960's, shows a great technological potential in producing (poly-)crystalline films of Ge or Si onto low-melting point substrates under reduced energy conditions. From the scientific point of view, the microscopic mechanisms behind the MIC phenomenon (still) represents a scientific challenge, where most of the proposed models are invariably influenced by the samples details giving the impression that they only apply to very specific metal-semiconductor combinations and/or circumstances. The lack of a simple-unified explanation of the MIC mechanism in amorphous Ge and Si films, allied to its technological importance, gave rise to this work. Accordingly, the paper starts by presenting some crucial aspects of the MIC phenomenon, as obtained from the investigation of amorphous Ge and Si films codeposited with some metals. In order to be inclusive, the experimental results of various metal-semiconductor bi-layered samples are also presented and discussed in detail. Based on the main aspects of these two (codeposited and bi-layered) metal-semiconductor systems, a simple phenomenological model is proposed to explain the MIC of amorphous Ge and Si films. The model relies on some basic chemical aspects (like electron distribution, orbital features, and bonding character) of the different atom species to account for the metal-semiconductor interaction and consequent amorphous-to-crystalline transformation. According to it, the metals presenting "extra-free" electrons into their outermost orbitals are the most effective in promoting an atom-bonding rearrangement and, therefore, in reducing the crystallization temperature of the amorphous Ge and Si films.

摘要

当与某些金属种类结合时,非晶态锗或硅薄膜的典型结晶温度可降低三到四倍,降至约200℃。这种现象被称为金属诱导结晶(MIC),自20世纪60年代末首次被观察到以来,在低能量条件下于低熔点衬底上制备锗或硅的(多)晶薄膜方面显示出巨大的技术潜力。从科学角度来看,MIC现象背后的微观机制(仍然)是一个科学挑战,其中大多数提出的模型总是受到样品细节的影响,给人的印象是它们仅适用于非常特定的金属 - 半导体组合和/或情况。由于缺乏对非晶态锗和硅薄膜中MIC机制的简单统一解释,再加上其技术重要性,引发了这项工作。因此,本文首先介绍了从与某些金属共沉积的非晶态锗和硅薄膜的研究中获得的MIC现象的一些关键方面。为了全面起见,还详细介绍并讨论了各种金属 - 半导体双层样品的实验结果。基于这两种(共沉积和双层)金属 - 半导体系统的主要方面,提出了一个简单的唯象模型来解释非晶态锗和硅薄膜的MIC。该模型依赖于不同原子种类的一些基本化学方面(如电子分布、轨道特征和键合特性)来解释金属 - 半导体相互作用以及随之而来的非晶态到晶态的转变。据此,在其最外层轨道中具有“额外自由”电子的金属在促进原子键重排方面最有效,因此在降低非晶态锗和硅薄膜的结晶温度方面也最有效。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a9a1/11681152/c462f52fa48d/41598_2024_81981_Fig1_HTML.jpg

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