Huang Chung-Hsuan, He Ssu-Chia, Chen Tsung-Yu, Cheng Chau-Jern, Tu Han-Yen
Institute of Electro-Optical Engineering, National Taiwan Normal University, Taipei 11677, Taiwan.
Department of Electrical Engineering, Chinese Culture University, Taipei 11114, Taiwan.
Sensors (Basel). 2024 Dec 12;24(24):7942. doi: 10.3390/s24247942.
This paper presents an effective three-dimensional (3D) surface reconstruction technique aimed at profiling composite surfaces with both specular and diffuse reflectance. Three-dimensional measurements based on fringe projection techniques perform well on diffuse reflective surfaces; however, when the measurement targets contain both specular and diffuse components, the efficiency of fringe projection decreases. To address this issue, the proposed technique integrates digital holography into the fringe projection setup, enabling the simultaneous capture of both specular and diffuse reflected light in the same optical path for full-field surface profilometry. Experimental results demonstrate that this technique effectively detects and accurately reconstructs the 3D profiles of specular and diffuse reflectance, with fringe analysis providing the absolute phase of composite surfaces. The experiments validate the effectiveness of this technique in the 3D surface measurement of integrated circuit carrier boards with chips exhibiting composite surfaces.
本文提出了一种有效的三维(3D)表面重建技术,旨在对具有镜面反射和漫反射的复合表面进行轮廓分析。基于条纹投影技术的三维测量在漫反射表面上表现良好;然而,当测量目标同时包含镜面反射和漫反射成分时,条纹投影的效率会降低。为了解决这个问题,所提出的技术将数字全息术集成到条纹投影设置中,能够在同一光路中同时捕获镜面反射光和漫反射光,用于全场表面轮廓测量。实验结果表明,该技术能够有效地检测并准确重建镜面反射和漫反射的3D轮廓,条纹分析可提供复合表面的绝对相位。实验验证了该技术在对具有复合表面的带芯片集成电路载板进行3D表面测量中的有效性。