Ye Lu, Zhang Xiangchao, Xu Min, Wang Wei
Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China.
Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China.
Sensors (Basel). 2025 Feb 5;25(3):944. doi: 10.3390/s25030944.
Infrared deflectometry is an efficient and accurate measuring method for curved surfaces fabricated via grinding or finish milling. The emitting properties and geometrical configurations of the infrared light source is a core component governing the measurement performance. In this paper, an infrared slit light source is designed based on the cavity structure of a polyimide heating film. This design ensures good stability and uniformity of the light source whilst effectively reducing background noise. Additionally, the light source can be applied as a calibration board for calibrating infrared cameras. The light source is aligned using a theodolite and cubic prism to control the positional deviations during scanning. Experimental results demonstrate that the proposed slit light source and calibration method can achieve a measurement accuracy of 1 µm RMS, which can meet the needs of rapid measurement in grinding. This approach provides a reliable, cost-effective, and efficient tool for surface quality assessments in optical workshops and has a broad application potential.
红外偏转测量法是一种用于测量通过磨削或精铣加工的曲面的高效且精确的方法。红外光源的发射特性和几何结构是决定测量性能的核心部件。本文基于聚酰亚胺加热膜的腔体结构设计了一种红外狭缝光源。这种设计确保了光源具有良好的稳定性和均匀性，同时有效降低了背景噪声。此外，该光源还可作为校准板用于校准红外相机。使用经纬仪和立方棱镜对光源进行对准，以控制扫描过程中的位置偏差。实验结果表明，所提出的狭缝光源和校准方法能够实现均方根误差为1 µm的测量精度，满足磨削快速测量的需求。该方法为光学车间的表面质量评估提供了一种可靠、经济高效的工具，具有广阔的应用潜力。
