Liang Chao, Zhang Wenqiang, Fan Yuxuan, Mei Ziqi, Zhang Lingyun, Sun Zhenci, You Rui, You Zheng, Zhao Xiaoguang
Department of Precision Instrument, Tsinghua University, Beijing, 100084, China.
Beijing Advanced Innovation Center for Integrated Circuits, Beijing, 100084, China.
Small. 2025 May;21(19):e2408943. doi: 10.1002/smll.202408943. Epub 2025 Jan 13.
The rapid development of flexible electronics necessitates simplified processes that integrate heterogeneous materials and structures. In this study, laser engraving is combined with electrochemical deposition (ECD) to directly fabricate various micro/nano-structured components and flexible electronic circuits. A theoretical framework and simulation model are developed to design the on-demand ECD on laser induced graphene (LIG), enabling the generation of multi-scale copper (Cu) materials with controllable oxidation states. The Cu-LIG composites exhibit high surface quality and reliability, meeting the requirements of flexible circuits. The study fabricates and characterizes multilayer circuits and complex functional devices, including electrochemical sensors, thin-film heaters, and wireless humidity sensors, to showcase the versatility of the LIG-ECD process. This approach can be extended to various polymer and metal deposition processes, paving the way for the development of high-performance flexible electronic devices.
柔性电子学的快速发展需要简化的工艺来集成异质材料和结构。在本研究中，激光雕刻与电化学沉积（ECD）相结合，直接制造各种微/纳米结构组件和柔性电子电路。开发了一个理论框架和仿真模型，以设计在激光诱导石墨烯（LIG）上按需进行的电化学沉积，从而生成具有可控氧化态的多尺度铜（Cu）材料。Cu-LIG复合材料具有高表面质量和可靠性，满足柔性电路的要求。该研究制造并表征了多层电路和复杂功能器件，包括电化学传感器、薄膜加热器和无线湿度传感器，以展示LIG-ECD工艺的多功能性。这种方法可以扩展到各种聚合物和金属沉积工艺，为高性能柔性电子器件的发展铺平道路。
