Liu Jing, Feng Yimin, Zheng Mian, Chen Shangkai, Wang Pengran, Zhao Mengdan, Huang Zhaoxian, Li Ming
College of Computer Science, South-Central Minzu University, Wuhan 430074, China.
China Ship Development and Design Center, Wuhan 430064, China.
iScience. 2025 Feb 1;28(2):111921. doi: 10.1016/j.isci.2025.111921. eCollection 2025 Feb 21.
Liquid-assisted methods can effectively suppress thermal effects, such as recrystallization, micro-cracks, and edge collapses of hard and brittle materials in femtosecond laser processing in air. However, the small and numerous bubbles generated by water solvents seriously affect laser processing efficiency. We have investigated ultra-thin rapeseed oil-assisted (approximately thickness) femtosecond laser processing of quartz glass microgrooves. Experimental results show that rapeseed oil-assisted laser ablation reduces the adverse effects of bubbles through the bubble coalescence effect but also helps to discharge the bottom debris via the formed micro-jet. According to the ionization model with the Drude equation, the laser intensity to reach the damage threshold of quartz in rapeseed oil is lower than that in air. Based on heat conduction theory, rapeseed oil can effectively reduce the quartz glass's temperature gradient. The ultra-thin rapeseed oil-assisted femtosecond laser etching method has strong potential and important practical significance in etching glass material.
液体辅助方法可以有效抑制热效应，比如在空气中进行飞秒激光加工时硬脆材料的再结晶、微裂纹和边缘崩塌等。然而，水溶剂产生的小而多的气泡严重影响激光加工效率。我们研究了超薄菜籽油辅助（厚度约为）的石英玻璃微槽飞秒激光加工。实验结果表明，菜籽油辅助激光烧蚀通过气泡合并效应减少了气泡的不利影响，还通过形成的微射流有助于排出底部碎屑。根据带有德鲁德方程的电离模型，在菜籽油中达到石英损伤阈值的激光强度低于在空气中的强度。基于热传导理论，菜籽油可以有效降低石英玻璃的温度梯度。超薄菜籽油辅助飞秒激光蚀刻方法在蚀刻玻璃材料方面具有很强的潜力和重要的实际意义。
