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多弧离子镀制备TiAlSiN/AlCrN多层涂层的高温氧化及耐磨性能

High-Temperature Oxidation and Wear Resistance of TiAlSiN/AlCrN Multilayer Coatings Prepared by Multi-Arc Ion Plating.

作者信息

Liu Jie, Mei Haijuan, Hua Junfang, Wang Juan, Wang Yongchao, Yi Genmiao, Deng Xin

机构信息

School of Intelligent Manufacturing, Guangzhou Panyu Polytechnic, Guangzhou 511483, China.

Guangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.

出版信息

Nanomaterials (Basel). 2025 Mar 27;15(7):503. doi: 10.3390/nano15070503.

DOI:10.3390/nano15070503
PMID:40214548
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11990346/
Abstract

TiAlSiN and AlCrN coatings are two representative coatings with excellent properties in TiN-based and CrN-based coatings, respectively. Multilayering is one of the most important directions for coating performance optimization. In this paper, nanoscale monolayer TiAlSiN, AlCrN, and multilayer TiAlSiN/AlCrN coatings were prepared. The microstructure, mechanical properties, oxidation resistance, and wear resistance of the above three coatings were investigated. The following properties of the TiAlSiN/AlCrN coating, including phase, nanohardness, elastic modulus, adhesion strength, and oxidation resistance, fall between those of the TiAlSiN and AlCrN coatings and conform to the "law of mixtures". Due to the interfacial effect of the multilayer coating, the residual stress of the TiAlSiN/AlCrN coating is less than that of the two monolayer coatings. At 500 °C, the order of wear resistance of the three coatings is consistent with the order of H/E* values, i.e., TiAlSiN > TiAlSiN/AlCrN > AlCrN; at 800 °C, the order of wear resistance becomes TiAlSiN/AlCrN > TiAlSiN > AlCrN because TiAlSiN coating has entered the rapid oxidization stage first, reducing its wear resistance.

摘要

TiAlSiN涂层和AlCrN涂层分别是TiN基涂层和CrN基涂层中具有优异性能的两种代表性涂层。多层结构是涂层性能优化的最重要方向之一。本文制备了纳米级单层TiAlSiN、AlCrN以及多层TiAlSiN/AlCrN涂层。研究了上述三种涂层的微观结构、力学性能、抗氧化性和耐磨性。TiAlSiN/AlCrN涂层的以下性能，包括相、纳米硬度、弹性模量、附着力强度和抗氧化性，介于TiAlSiN涂层和AlCrN涂层之间，符合“混合定律”。由于多层涂层的界面效应，TiAlSiN/AlCrN涂层的残余应力小于两种单层涂层。在500℃时，三种涂层的耐磨性顺序与H/E*值顺序一致，即TiAlSiN＞TiAlSiN/AlCrN＞AlCrN；在800℃时，由于TiAlSiN涂层首先进入快速氧化阶段，降低了其耐磨性，耐磨性顺序变为TiAlSiN/AlCrN＞TiAlSiN＞AlCrN。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/4a54a85b6931/nanomaterials-15-00503-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/c0338dec4708/nanomaterials-15-00503-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/85d29e6ade42/nanomaterials-15-00503-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/7729b91f1d8a/nanomaterials-15-00503-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/e98050a857a7/nanomaterials-15-00503-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/a2a3bb12e6b2/nanomaterials-15-00503-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/51a6bdeaf8e4/nanomaterials-15-00503-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/d7b7bba5bdba/nanomaterials-15-00503-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/f42b7baeccd4/nanomaterials-15-00503-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/4a54a85b6931/nanomaterials-15-00503-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/c0338dec4708/nanomaterials-15-00503-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/bc9b3e92dabf/nanomaterials-15-00503-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/de1bf3d25a78/nanomaterials-15-00503-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/992c459eb1ff/nanomaterials-15-00503-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/efe71d06aa7d/nanomaterials-15-00503-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/5d231c6750ea/nanomaterials-15-00503-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/85d29e6ade42/nanomaterials-15-00503-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/7729b91f1d8a/nanomaterials-15-00503-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/e98050a857a7/nanomaterials-15-00503-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/a2a3bb12e6b2/nanomaterials-15-00503-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/51a6bdeaf8e4/nanomaterials-15-00503-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/d7b7bba5bdba/nanomaterials-15-00503-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/f42b7baeccd4/nanomaterials-15-00503-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6826/11990346/4a54a85b6931/nanomaterials-15-00503-g014.jpg

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