• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

基于在具有应变效应的柔性云母和刚性氧化镁衬底上外延生长的CoFe薄膜的磁滞回线和各向异性磁阻的磁传感器研究。

Investigation of a Magnetic Sensor Based on the Magnetic Hysteresis Loop and Anisotropic Magnetoresistance of CoFe Thin Films Epitaxial Grown on Flexible Mica and Rigid MgO Substrates with Strain Effect.

作者信息

Cheng Jen-Chieh, You Min-Chang, Anbalagan Aswin Kumar, Su Guang-Yang, Chuang Kai-Wei, Yang Chao-Yao, Lee Chih-Hao

机构信息

Institute of Nuclear Engineering and Science, National Tsing Hua University, Hsinchu 30013, Taiwan.

Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan.

出版信息

Micromachines (Basel). 2025 Mar 30;16(4):412. doi: 10.3390/mi16040412.

DOI:10.3390/mi16040412
PMID:40283288
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12029272/
Abstract

The anisotropic magnetoresistance (AMR) effect is widely used in microscale and nanoscale magnetic sensors. In this study, we investigate the correlation between AMR and the crystal structure, epitaxial relationship, and magnetic properties of CoFe thin films deposited on rigid MgO and flexible mica substrates. The AMR ratio is approximately 1.6% for CoFe films on mica, lower than the 2.5% observed in epitaxially grown films on MgO substrates. The difference is likely due to the well-defined easy axis in the single domain epitaxial thin films on MgO, which enhances the AMR ratio. Microscopic strain induced by lattice mismatch and bending on flexible substrates were determined using grazing incidence X-ray diffraction and extended X-ray absorption fine structure techniques. These results showed that neither microscopic nor macroscopic strain (below 0.5%) affects the AMR ratio on mica, suggesting its suitability for magnetic sensors in flexible and wearable devices. Additionally, investigating M-H loops under various growth temperatures, lattice mismatch conditions, and bending strains could further benefit the fabrication and integration of the micro-scale magnetic sensors in the microelectronic industry.

摘要

各向异性磁阻（AMR）效应在微纳尺度磁传感器中有着广泛应用。在本研究中，我们探究了沉积在刚性MgO和柔性云母衬底上的CoFe薄膜的AMR与晶体结构、外延关系及磁性能之间的相关性。云母上CoFe薄膜的AMR比率约为1.6%，低于在MgO衬底上外延生长薄膜中观察到的2.5%。这种差异可能是由于MgO上单畴外延薄膜中明确的易轴，它提高了AMR比率。利用掠入射X射线衍射和扩展X射线吸收精细结构技术确定了柔性衬底上晶格失配和弯曲引起的微观应变。这些结果表明，微观和宏观应变（低于0.5%）均不会影响云母上的AMR比率，这表明其适用于柔性和可穿戴设备中的磁传感器。此外，研究不同生长温度、晶格失配条件和弯曲应变下的M-H回线，可能会进一步有利于微电子行业中微尺度磁传感器的制造和集成。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/24cdb28484a3/micromachines-16-00412-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/151a7b5e5938/micromachines-16-00412-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/468f35017548/micromachines-16-00412-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/9969430e9240/micromachines-16-00412-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/8d0b9bc9c42e/micromachines-16-00412-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/d9b972d2dd3f/micromachines-16-00412-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/00bca9e30769/micromachines-16-00412-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/f1cd8f85daf1/micromachines-16-00412-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/eca6cea445af/micromachines-16-00412-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/69718377a1f7/micromachines-16-00412-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/24cdb28484a3/micromachines-16-00412-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/151a7b5e5938/micromachines-16-00412-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/468f35017548/micromachines-16-00412-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/9969430e9240/micromachines-16-00412-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/8d0b9bc9c42e/micromachines-16-00412-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/d9b972d2dd3f/micromachines-16-00412-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/00bca9e30769/micromachines-16-00412-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/f1cd8f85daf1/micromachines-16-00412-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/eca6cea445af/micromachines-16-00412-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/69718377a1f7/micromachines-16-00412-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8a7d/12029272/24cdb28484a3/micromachines-16-00412-g010.jpg

相似文献

1
Investigation of a Magnetic Sensor Based on the Magnetic Hysteresis Loop and Anisotropic Magnetoresistance of CoFe Thin Films Epitaxial Grown on Flexible Mica and Rigid MgO Substrates with Strain Effect.基于在具有应变效应的柔性云母和刚性氧化镁衬底上外延生长的CoFe薄膜的磁滞回线和各向异性磁阻的磁传感器研究。
Micromachines (Basel). 2025 Mar 30;16(4):412. doi: 10.3390/mi16040412.
2
Investigating Anisotropic Magnetoresistance in Epitaxially Strained CoFe Thin Films on a Flexible Mica.研究柔性云母上外延应变CoFe薄膜中的各向异性磁电阻
Nanomaterials (Basel). 2023 Dec 16;13(24):3154. doi: 10.3390/nano13243154.
3
Multifunctional LaSrMnO (LSMO) Thin Films Integrated on Mica Substrates toward Flexible Spintronics and Electronics.集成在云母衬底上的多功能镧锶锰氧化物（LSMO）薄膜用于柔性自旋电子学和电子学
ACS Appl Mater Interfaces. 2018 Dec 12;10(49):42698-42705. doi: 10.1021/acsami.8b16626. Epub 2018 Nov 28.
4
Highly flexible anisotropic magnetoresistance sensor for wearable electronics.用于可穿戴电子产品的高柔性各向异性磁阻传感器。
Rev Sci Instrum. 2023 Apr 1;94(4). doi: 10.1063/5.0140013.
5
High-Crystallinity Epitaxial SbSe Thin Films on Mica for Flexible Near-Infrared Photodetectors.用于柔性近红外光电探测器的云母上的高结晶度外延SbSe薄膜。
ACS Appl Mater Interfaces. 2020 Aug 5;12(31):35222-35231. doi: 10.1021/acsami.0c08467. Epub 2020 Jul 21.
6
Modulating Exchange Bias, Anisotropic Magnetoresistance, and Planar Hall Resistance of Flexible Co/MnN Epitaxial Bilayers on Mica by Bending Strain.通过弯曲应变调制柔性 Co/MnN 外延双层膜的交换偏置、各向异性磁电阻和平面霍尔电阻。
ACS Appl Mater Interfaces. 2023 Feb 1;15(4):6209-6216. doi: 10.1021/acsami.2c21780. Epub 2023 Jan 18.
7
Giant magnetoresistance and anomalous magnetic properties of highly epitaxial ferromagnetic LaBaCo2O(5.5+δ) thin films on (001) MgO.高度外延的铁磁 LaBaCo2O(5.5+δ)薄膜在(001)MgO 上的巨磁电阻和异常磁性能。
ACS Appl Mater Interfaces. 2012 Oct 24;4(10):5524-8. doi: 10.1021/am301427c. Epub 2012 Sep 21.
8
Van der Waals Epitaxy of Bismuth-Based Multiferroic Layered Supercell Oxide Thin Films Integrated on Flexible Mica Substrate.集成在柔性云母衬底上的铋基多铁性层状超晶胞氧化物薄膜的范德华外延
Small Sci. 2023 Dec 28;4(2):2300244. doi: 10.1002/smsc.202300244. eCollection 2024 Feb.
9
Interplay between magnetocrystalline anisotropy and exchange bias in epitaxial CoO/Co films.外延CoO/Co薄膜中磁晶各向异性与交换偏置之间的相互作用
J Phys Condens Matter. 2016 May 18;28(19):196002. doi: 10.1088/0953-8984/28/19/196002. Epub 2016 Apr 19.
10
Dependence of the Growth Mode in Epitaxial FePt Films on Surface Free Energy.外延FePt薄膜生长模式对表面自由能的依赖性。
ACS Appl Mater Interfaces. 2021 Apr 14;13(14):16620-16627. doi: 10.1021/acsami.0c22510. Epub 2021 Mar 31.

引用本文的文献

1
Enhanced Microwave Absorption Performance of Amorphous CoFe Nanoparticles.非晶态钴铁纳米颗粒的增强微波吸收性能
Nanomaterials (Basel). 2025 Jul 14;15(14):1091. doi: 10.3390/nano15141091.

本文引用的文献

1
Investigating Anisotropic Magnetoresistance in Epitaxially Strained CoFe Thin Films on a Flexible Mica.研究柔性云母上外延应变CoFe薄膜中的各向异性磁电阻
Nanomaterials (Basel). 2023 Dec 16;13(24):3154. doi: 10.3390/nano13243154.
2
Highly flexible anisotropic magnetoresistance sensor for wearable electronics.用于可穿戴电子产品的高柔性各向异性磁阻传感器。
Rev Sci Instrum. 2023 Apr 1;94(4). doi: 10.1063/5.0140013.
3
Anisotropic magnetoresistance: materials, models and applications.各向异性磁阻：材料、模型与应用
R Soc Open Sci. 2023 Oct 18;10(10):230564. doi: 10.1098/rsos.230564. eCollection 2023 Oct.
4
Investigation of Multilayer Nanostructures of Magnetic Straintronics Based on the Anisotropic Magnetoresistive Effect.基于各向异性磁阻效应的磁性应变电子学多层纳米结构研究
Sensors (Basel). 2021 Aug 27;21(17):5785. doi: 10.3390/s21175785.
5
Flexible Epsilon Iron Oxide Thin Films.柔性ε-氧化铁薄膜
ACS Appl Mater Interfaces. 2021 Apr 14;13(14):17006-17012. doi: 10.1021/acsami.0c23104. Epub 2021 Mar 30.
6
Intrinsic Mechanism for Anisotropic Magnetoresistance and Experimental Confirmation in Co_{x}Fe_{1-x} Single-Crystal Films.CoₓFe₁₋ₓ单晶薄膜中各向异性磁阻的内在机制及实验验证
Phys Rev Lett. 2020 Aug 28;125(9):097201. doi: 10.1103/PhysRevLett.125.097201.
7
An approach to determine the easy axis of magnetic film by anisotropic magnetoresistance measurements.一种通过各向异性磁阻测量来确定磁性薄膜易轴的方法。
J Phys Condens Matter. 2020 May 27;32(23):235802. doi: 10.1088/1361-648X/ab5ca3.
8
A bimodal soft electronic skin for tactile and touchless interaction in real time.一种用于实时触摸和非接触式交互的双模软电子皮肤。
Nat Commun. 2019 Sep 27;10(1):4405. doi: 10.1038/s41467-019-12303-5.
9
Heteroepitaxy of Co-Based Heusler Compound/Muscovite for Flexible Spintronics.钴基 Heusler 化合物/白云母的异质外延用于柔性 spintronics。
ACS Appl Mater Interfaces. 2019 Sep 25;11(38):35162-35168. doi: 10.1021/acsami.9b12219. Epub 2019 Sep 11.
10
Oxide Heteroepitaxy-Based Flexible Ferroelectric Transistor.基于氧化物异质外延的柔性铁电晶体管。
ACS Appl Mater Interfaces. 2019 Jul 24;11(29):25882-25890. doi: 10.1021/acsami.9b06332. Epub 2019 Jul 12.