Cui Wanyun, Zong Jianwei, Li Junxiang, Ping Qiang, Qiu Lei, Lou Liang
School of Microelectronics, Shanghai University, Shanghai 201800, China.
Shanghai Industrial µTechnology Research Institute, Shanghai 201899, China.
Micromachines (Basel). 2025 Apr 15;16(4):471. doi: 10.3390/mi16040471.
In recent years, implantable medical devices (IMDs) have introduced groundbreaking solutions for managing various health conditions. However, traditional implanted batteries necessitate periodic surgical replacement and tend to be relatively bulky, posing significant inconvenience to patients. To overcome these limitations, researchers have investigated various wireless power transfer (WPT) techniques, among which the ultrasonic wireless power transmission (UWPT) technique has distinct advantages. However, limited research has been conducted on ultrasonic power transfer at lower operating frequencies. Therefore, this study explores wireless power transfer using scandium-doped aluminum nitride (AlScN) piezoelectric micro-electromechanical transducers (PMUTs) in deionized (DI) water. Experimental results indicate that at an operating frequency of 14.075 kHz, the power transfer efficiency (PTE) can reach up to 2.68% under optimal load resistance conditions. Furthermore, a low-frequency UWPT system based on a AlScN PMUT has been developed, delivering a stable 3.3 V output for implantable medical devices and contributing to the advancement of a full-spectrum UWPT framework.
近年来，植入式医疗设备（IMD）为管理各种健康状况带来了开创性的解决方案。然而，传统的植入式电池需要定期进行手术更换，而且往往体积较大，给患者带来极大不便。为克服这些限制，研究人员研究了各种无线电力传输（WPT）技术，其中超声无线电力传输（UWPT）技术具有明显优势。然而，针对较低工作频率下的超声功率传输开展的研究有限。因此，本研究探索了在去离子（DI）水中使用掺钪氮化铝（AlScN）压电微机电换能器（PMUT）进行无线电力传输。实验结果表明，在14.075 kHz的工作频率下，在最佳负载电阻条件下功率传输效率（PTE）可达2.68%。此外，还开发了一种基于AlScN PMUT的低频UWPT系统，可为植入式医疗设备提供稳定的3.3 V输出，并推动全谱UWPT框架的发展。
