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基于多电热共同驱动的双向微器件的设计与驱动特性

Design and Driving Characteristics of a Bidirectional Micro-Device Based on Multi-Electrothermal Co-Actuation.

作者信息

Tang Yujuan, Guo Zihao, Ding Yujiao, Wang Xinjie

机构信息

School of Intelligent Science and Control Engineering, Jinling Institute of Technology, Nanjing 211169, China.

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.

出版信息

Micromachines (Basel). 2025 Apr 21;16(4):487. doi: 10.3390/mi16040487.

DOI:10.3390/mi16040487
PMID:40283362
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12029375/
Abstract

In this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic interference in electrothermal actuators. Based on the working principle of the multi-electrothermal co-actuation device and the mathematical model of the single V-shaped electrothermal actuator established in this paper, the temperature distribution of the V-shaped electrothermal actuator is simulated. In addition, the dynamic response and the effect of geometric factors on the output performance of the multi-electrothermal co-actuation device are analyzed in detail. Furthermore, driving characteristics tests of the electrothermal micro-device are carried out. The experimental findings indicate that a displacement of approximately 258.95 μm with a response time of about 156.51 ms can be achieved by the V-shaped electrothermal actuator when the applied voltage is 1.2 V. In a single cycle, a total displacement of 340 μm is obtained by the co-actuation device in around 1.28 s.

摘要

本文针对引信安全系统提出了一种基于多电热协同驱动的双向微器件,该器件结合了电热致动器结构简单、尺寸小、输入电压低、输出大以及无电磁干扰等优点。基于本文建立的多电热协同驱动器件的工作原理和单个V形电热致动器的数学模型,对V形电热致动器的温度分布进行了模拟。此外,详细分析了多电热协同驱动器件的动态响应以及几何因素对其输出性能的影响。进一步开展了电热微器件的驱动特性测试。实验结果表明,当施加电压为1.2 V时,V形电热致动器可实现约258.95μm的位移,响应时间约为156.51 ms。在单个周期内,协同驱动器件在约1.28 s内获得了340μm的总位移。

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Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers.具有三个手指的三维(3D)电热微夹钳的理论热机械建模与实验验证
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