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用于洁净室和真空应用的新型润滑剂配方的研发。

Development of novel lubricant formulation for cleanroom and vacuum application.

作者信息

Schüler Fabian, Keller Andreas, Grebe Markus, Kent Anthony, Buttery Michael, Holynska Malgorzata

机构信息

MATERIALES GmbH, Offakamp 9f, 22529, Hamburg, Germany.

Competence Center of Tribology (CCT), Mannheim University of Applied Sciences, 68163, Mannheim, Germany.

出版信息

Sci Rep. 2025 May 2;15(1):15407. doi: 10.1038/s41598-025-97285-9.

DOI:10.1038/s41598-025-97285-9
PMID:40316624
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12048657/
Abstract

Contamination sensitive applications are processes in various industries that require extremely controlled conditions, and which are conducted in dedicated cleanrooms or in cleanroom-like environments. Process cleanliness and quality can further be enhanced by employment of vacuum, like in semiconductor or medical device manufacturing, or it is inevitably present as in some space applications. Such environments impose unique demands on materials from two perspectives - performance and cleanliness. To meet the comprehensive set of requirements, the development approaches diverge from conventional methods and strategies for material development. In this article, the specific area of lubricants in cleanroom and vacuum and its impact on their development will be discussed. Firstly, the implications of vacuum and cleanroom requirements on lubricants will be discussed. An overall development methodology and the specific validation and qualification methods will be presented, and insights into material selection and formulation development will be provided.

摘要

对污染敏感的应用是各行业中需要极其严格控制条件的工艺,这些工艺在专门的洁净室或类似洁净室的环境中进行。通过使用真空可以进一步提高工艺的清洁度和质量,如在半导体或医疗器械制造中,或者在某些太空应用中真空是不可避免存在的。这样的环境从性能和清洁度两个角度对材料提出了独特的要求。为了满足这一系列综合要求,开发方法与传统的材料开发方法和策略有所不同。在本文中,将讨论洁净室和真空中润滑剂的特定领域及其对润滑剂开发的影响。首先,将讨论真空和洁净室要求对润滑剂的影响。将介绍总体开发方法以及具体的验证和鉴定方法,并提供材料选择和配方开发方面的见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/2b7b6b7ba7d7/41598_2025_97285_Fig13_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/2727e5c27eeb/41598_2025_97285_Fig1_HTML.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/c25de7027db1/41598_2025_97285_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/67721f698e08/41598_2025_97285_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/265cad243299/41598_2025_97285_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/6ab780585e6c/41598_2025_97285_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/510242aac5bd/41598_2025_97285_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/e2e6ae729338/41598_2025_97285_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/0c63a472556b/41598_2025_97285_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/ae6f24e351b0/41598_2025_97285_Fig11_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/19308223fabd/41598_2025_97285_Fig12_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/2b7b6b7ba7d7/41598_2025_97285_Fig13_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/2727e5c27eeb/41598_2025_97285_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/fa6a08ca3cb2/41598_2025_97285_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/ddf81fd0fd44/41598_2025_97285_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/c25de7027db1/41598_2025_97285_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/67721f698e08/41598_2025_97285_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/265cad243299/41598_2025_97285_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/6ab780585e6c/41598_2025_97285_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/510242aac5bd/41598_2025_97285_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/e2e6ae729338/41598_2025_97285_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/0c63a472556b/41598_2025_97285_Fig10_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/ae6f24e351b0/41598_2025_97285_Fig11_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/19308223fabd/41598_2025_97285_Fig12_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8ac9/12048657/2b7b6b7ba7d7/41598_2025_97285_Fig13_HTML.jpg

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本文引用的文献

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An Overview of Potential Alternatives for the Multiple Uses of Per- and Polyfluoroalkyl Substances.全氟和多氟烷基物质多种用途的潜在替代方案概述。
Environ Sci Technol. 2025 Feb 4;59(4):2031-2042. doi: 10.1021/acs.est.4c09088. Epub 2025 Jan 24.
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Ionic Liquids as Lubricant Additives: A Review.离子液体作为润滑剂添加剂:综述。
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通过自热解吸-气相色谱-质谱联用技术对洁净室空气和晶圆表面作为微量污染物的邻苯二甲酸酯进行直接定量分析。
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