Primates possess a more developed central nervous system and a higher level of intelligence than rodents. Detecting and modulating deep brain activity in primates enhances our understanding of neural mechanisms, facilitates the study of major brain diseases, enables brain-computer interactions, and supports advancements in artificial intelligence. Traditional imaging methods such as magnetic resonance imaging, positron emission computed tomography, and scalp electroencephalogram are limited in spatial resolution. They cannot accurately capture deep brain signals from individual neurons. With the progress of microelectromechanical systems and other micromachining technologies, single-neuron level detection and stimulation technology in rodents based on microelectrodes has made important progress. However, compared with rodents, human and nonhuman primates have larger brain volume that needs deeper implantation depth, and the test object has higher safety and device preparation requirements. Therefore, high-resolution devices suitable for long-term detection in the brains of primates are urgently needed. This paper reviewed electrode array devices used for electrophysiological and electrochemical detections in primates' deep brains. The research progress of neural recording and stimulation technologies was introduced from the perspective of electrode type and device structures, and their potential value in neuroscience research and clinical disease treatments was discussed. Finally, it is speculated that future electrodes will have a lot of room for development in terms of flexibility, high resolution, deep brain, and high throughput. The improvements in electrode forms and preparation process will expand our understanding of deep brain neural activities, and bring new opportunities and challenges for the further development of neuroscience.