Lu Yuanzhenzi, Guan Zeyu, Xu Bo, Shen Shengchun, Yin Yuewei, Li Xiaoguang
Hefei National Research Center for Physical Sciences at the Microscale, Department of Physics and CAS Key Laboratory of Strongly-Coupled Quantum Matter Physics, University of Science and Technology of China, Hefei 230026, China.
Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
ACS Appl Mater Interfaces. 2025 May 21;17(20):29847-29854. doi: 10.1021/acsami.5c01547. Epub 2025 May 7.
HfO-based ferroelectric tunnel junctions (FTJs) are currently receiving significant attention in the fields of nonvolatile memory and neuromorphic computing. Here, an FTJ memristor utilizing a Pt/HfZrO/TiO/TiN architecture with a TiO interlayer is prepared, and it exhibits stable resistive switching with an ON/OFF ratio reaching 5.8 × 10 at an operational speed of 50 ns, along with good retention exceeding 10 s (extended to over 10 years by linear extrapolation) at high temperatures up to 160 °C. Additionally, the TiO interlayer improves the interface between HZO and TiN, resulting in superior resistive switching endurance of 2 × 10 cycles with an ON/OFF ratio greater than 50, compared to other HfO-based FTJ devices. As an artificial synapse, the FTJ attains highly symmetric 128-state conductance manipulation with a low cycle-to-cycle variation of 2.75%. When leveraged in a simulated convolutional neural network for speech recognition tasks, the system achieves high accuracy ∼97.6%. Remarkably, even with a signal-to-noise ratio of 10 dB, the recognition accuracy remains at 90.2%, highlighting the remarkable noise immunity. These results underscore the significant potential of FTJs in applications involving multistate nonvolatile memory and artificial synapses, heralding advance in the field of neuromorphic computing and beyond.
基于HfO的铁电隧道结(FTJs)目前在非易失性存储器和神经形态计算领域受到了广泛关注。在此,制备了一种采用Pt/HfZrO/TiO/TiN结构并带有TiO中间层的FTJ忆阻器,它在50 ns的工作速度下表现出稳定的电阻开关特性,开/关比达到5.8×10,并且在高达160°C的高温下具有超过10 s的良好保持性(通过线性外推可延长至超过10年)。此外,TiO中间层改善了HZO与TiN之间的界面,与其他基于HfO的FTJ器件相比,其电阻开关耐久性高达2×10个周期,开/关比大于50。作为一种人工突触,FTJ实现了高度对称的128态电导操纵,周期间变化率低至2.75%。当应用于模拟卷积神经网络进行语音识别任务时,该系统实现了约97.6%的高精度。值得注意的是,即使在信噪比为10 dB的情况下,识别准确率仍保持在90.2%,凸显了其卓越的抗噪声能力。这些结果强调了FTJs在涉及多态非易失性存储器和人工突触的应用中的巨大潜力,预示着神经形态计算及其他领域的进步。