Fernández Asunción, de Haro M Carmen Jiménez, Hufschmidt Dirk, Montes Olga, Sauvage Thierry, Ferrer F Javier, Caillard Amaël, Brault Pascal, Thomann Anne-Lise
Institute of Materials Science of Seville (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092, Sevilla, Spain.
CEMHTI Laboratory, CNRS-UPR3079, 1D Avenue de La Recherche Scientific, 45071, Orléans, France.
Sci Rep. 2025 Jul 2;15(1):22935. doi: 10.1038/s41598-025-06889-8.
Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. He and He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). Helium desorption was investigated by IBA in a dedicated chamber for "in situ" thermal evolution in vacuum. The simultaneous recording of the helium and matrix-element signals shows different behaviors of the different matrix elements (i.e. Co, Si and Zr) and deposition conditions (i.e., DC or RF discharge modes and dynamic or quasistatic vacuum). Effusion, blistering, delamination and flaking have been observed for the different samples leading to the formation of nano-porous/nanostructured thin films. The methodology is being envisaged as a process for nanostructured thin-films fabrication with potential applications.
据报道，在氦磁控管放电（MS）中对钴、硅和锆进行溅射是一种自下而上的方法，用于获得充氦薄膜（即封装在基体材料中的氦气和充满氦气的纳米孔）。通过离子束分析（IBA）以及扫描和透射电子显微镜（SEM和TEM）进行了成分和微观结构分析。在专门用于真空“原位”热演化的腔室中，通过IBA研究了氦的解吸。氦和基体元素信号的同时记录显示了不同基体元素（即钴、硅和锆）以及沉积条件（即直流或射频放电模式以及动态或准静态真空）的不同行为。对于不同的样品，观察到了渗出、起泡、分层和剥落现象，从而形成了纳米多孔/纳米结构薄膜。该方法被设想为一种用于制造具有潜在应用的纳米结构薄膜的工艺。
