Ma Zenghan, Zhuang Wei, Zhao Yang, Ruan Chuanjing, Tian Qin, Yao Jiamin, Feng Jinyang, Wu Shuqing, Fang Fang, Wan Ling
College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130026, China.
National Institute of Metrology, Beijing 100029, China.
Sensors (Basel). 2025 Jul 2;25(13):4136. doi: 10.3390/s25134136.
Measuring low-frequency and ultra-low-frequency vibration signals is of critical importance in fields such as structural mechanics, geological exploration, aerospace, precision machining, and biomedicine. Existing methods face limitations in achieving both ultra-low-frequency range and high precision. We present an ultra-low-frequency vibration measurement method based on the atom interferometer, capable of measuring vibration signals from 0.01 Hz to DC. The performance of measurement was experimentally demonstrated for vibrations between 0.007 Hz and 0.01 Hz, achieving a sensitivity of 1.1 μm/s2/Hz. Incorporating active vibration isolation can further enhance the measurement range, increasing the optimal sensitivity to 0.2 μm/s2/Hz.
测量低频和超低频振动信号在结构力学、地质勘探、航空航天、精密加工和生物医学等领域至关重要。现有方法在实现超低频范围和高精度方面存在局限性。我们提出了一种基于原子干涉仪的超低频振动测量方法,能够测量从0.01 Hz到直流的振动信号。通过实验证明了该测量方法在0.007 Hz至0.01 Hz振动频率范围内的性能,实现了1.1μm/s²/Hz的灵敏度。采用主动隔振可进一步扩大测量范围,将最佳灵敏度提高到0.2μm/s²/Hz。