Niels Margot, Vissers Ewoud, Vanackere Tom, Moerman Arno, Guo Xin, Geerinck Peter, Soltanian Emadreza, Zhang Jing, Janssen Sofie, Verheyen Peter, Singh Neha, Bode Dieter, Davi Martin, Ferraro Filippo, Absil Philippe, Balakrishnan Sadhishkumar, Van Campenhout Joris, Hänsch Sebastian, Mai Hanh, Singh Nishant, Roelkens Günther, Uvin Sarah, Billet Maximilien, Kuyken Bart
Opt Lett. 2025 Aug 1;50(15):4678-4681. doi: 10.1364/OL.564405.
We present a scalable approach for the heterogeneous integration of lithium niobate onto silicon photonics platforms using wafer-scale micro-transfer printing. This approach enables the incorporation of efficient, high-speed modulators while maintaining compatibility with back-end processing. Electro-optic modulators with a length of 7 mm, fabricated with this technology, achieve a half-wave voltage of 4 V and a bandwidth exceeding 70 GHz. Furthermore, as proof of concept, we demonstrate the integration of more than 200 lithium niobate photonic structures directly on a 200-mm wafer and characterize their passive optical properties.
我们展示了一种使用晶圆级微转移印刷技术将铌酸锂异质集成到硅光子平台上的可扩展方法。这种方法能够集成高效、高速调制器，同时保持与后端工艺的兼容性。采用该技术制造的长度为7毫米的电光调制器，半波电压为4伏，带宽超过70吉赫兹。此外，作为概念验证，我们展示了在一个200毫米晶圆上直接集成200多个铌酸锂光子结构，并对其无源光学特性进行了表征。
