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具有级联能量转换的高峰值功率垂直集成垂直腔面发射激光器复合腔建模

Modeling of high-peak-power vertically integrated VCSEL composite cavity with cascaded energy conversion.

作者信息

Li Shengnan, Dai Jingjing, Li Wei, Li Chong, Hui Yongling, Wang Pengzhuo, Wang Zhiyong

出版信息

Opt Express. 2025 Apr 21;33(8):16704-16716. doi: 10.1364/OE.551805.

DOI:10.1364/OE.551805
PMID:40797925
Abstract

Chip-scale, kilowatt-scale peak-power short-pulse lasers are becoming increasingly important for applications in various fields. This study systematically explores the cascaded energy conversion and oscillation characteristics of vertically integrated composite cavity VCSEL with cascaded energy conversion, aiming to establish what we believe to be a novel route to achieve kilowatt-level high peak power short-pulse monolithically integrated lasers. In this paper, the stable oscillation conditions under different feedback coefficient and signal gain are investigated based on equivalent resonator theory. By deriving simultaneous coupled rate equations, the dynamics process on coupled oscillation in composite cavity are explored and the effective regime for achieving high peak power laser is uncovered. The effects of the reflectivity of the P-DBR and the absorption rate of the Nd:YAG on the laser oscillation characteristics are further revealed analytically. Stable pulses with a highest peak power of 137.1 kW, a maximum pulse energy of 24.9 µJ, a pulse width of 123.7 ps are achieved in the vertically integrated composite cavity VCSEL within a 100 µm aperture. Additionally, by utilizing expanded 2D coherent VCSEL arrays with high beam quality, we obtained a maximum pulse energy up to 83.9 mJ with a slope efficiency of 0.54 W/A. Our work provides an avenue for steering on-chip integration and developing believed to be novel laser arrays capable of operating at high peak powers exceeding kilowatts, with potential applications in remote laser detection and ranging.

摘要

芯片级、千瓦级峰值功率短脉冲激光器在各个领域的应用中变得越来越重要。本研究系统地探索了具有级联能量转换的垂直集成复合腔垂直腔面发射激光器(VCSEL)的级联能量转换和振荡特性,旨在建立一条我们认为能够实现千瓦级高峰值功率短脉冲单片集成激光器的新途径。本文基于等效谐振器理论研究了不同反馈系数和信号增益下的稳定振荡条件。通过推导联立耦合速率方程,探索了复合腔中耦合振荡的动力学过程,并揭示了实现高峰值功率激光器的有效区域。进一步通过解析揭示了P-DBR的反射率和Nd:YAG的吸收率对激光振荡特性的影响。在100 µm孔径的垂直集成复合腔VCSEL中实现了最高峰值功率为137.1 kW、最大脉冲能量为24.9 µJ、脉冲宽度为123.7 ps的稳定脉冲。此外,通过利用具有高光束质量的扩展二维相干VCSEL阵列,我们获得了高达83.9 mJ的最大脉冲能量,斜率效率为0.54 W/A。我们的工作为指导片上集成和开发据信能够在超过千瓦的高峰值功率下运行的新型激光阵列提供了一条途径,在远程激光探测和测距方面具有潜在应用。

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