Huang Hao, Sun Jianping, Wang Guangyao, Li Ting, Xiong Yingfan, Sun Liquan, Chen Songkui, Duan Yuning
Opt Express. 2025 Jun 30;33(13):27809-27823. doi: 10.1364/OE.559422.
A dual Fabry-Perot interferometric fiber-optic pressure sensor with temperature compensation is proposed for high-precision measurement. By integrating two Fabry-Perot sensors within a specialized encapsulation structure to form a pressure measurement cavity and a temperature reference cavity, the system effectively decouples pressure and temperature effects on cavity length. The detection of pressure and temperature variations is achieved through cavity length demodulation of the acquired spectral data using a multi-extrema-tracing algorithm. The system exhibits a pressure sensitivity of -8.627 nm/MPa at 20 ℃ over the pressure range of 0 MPa - 10 MPa, with nonlinearity error and repeatability error equivalent to maximum pressure deviations of 5.085 Pa and 25.369 Pa, respectively. Additionally, the temperature sensitivities of the two sensors are 0.1848nm/°C and 0.2575 nm/°C, respectively. Based on the temperature responses of the sensors, temperature compensation and error correction are applied to enhance the precision of pressure measurement. With its outstanding linearity, stability, and precision, the system demonstrates great potential for dynamic pressure measurement in extreme ocean environments.
提出了一种具有温度补偿功能的双法布里 - 珀罗干涉式光纤压力传感器,用于高精度测量。通过将两个法布里 - 珀罗传感器集成在一个特殊的封装结构中,形成压力测量腔和温度参考腔,该系统有效地解耦了压力和温度对腔长的影响。利用多极值跟踪算法对采集到的光谱数据进行腔长解调,实现对压力和温度变化的检测。该系统在20℃、0MPa至10MPa的压力范围内,压力灵敏度为-8.627nm/MPa,非线性误差和重复性误差分别相当于最大压力偏差5.085Pa和25.369Pa。此外,两个传感器的温度灵敏度分别为0.1848nm/℃和0.2575nm/℃。基于传感器的温度响应,进行温度补偿和误差校正,以提高压力测量的精度。该系统具有出色的线性度、稳定性和精度,在极端海洋环境下的动态压力测量中具有巨大潜力。