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用于AlO/AgO薄膜功能工程的激光脉冲时间整形：从结构控制到增强的气敏性能

Temporal Sculpting of Laser Pulses for Functional Engineering of AlO/AgO Films: From Structural Control to Enhanced Gas Sensing Performance.

作者信息

Doohee Doaa Yaseen, Azarian Abbas, Mozaffari Mohammad Reza

机构信息

Department of Physics, University of Qom, Qom 3716146611, Iran.

出版信息

Sensors (Basel). 2025 Sep 18;25(18):5836. doi: 10.3390/s25185836.

DOI:10.3390/s25185836
PMID:41013072
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12473392/
Abstract

This study examines the effects of laser pulse duration on the structural, morphological, optical, and gas-sensing characteristics of Al2O3/AgO thin films deposited on glass substrates using pulsed laser deposition (PLD). Pulse durations of 10, 8, and 6 nanoseconds were achieved through optical lens modifications to control both energy density and laser spot size. X-ray diffraction (XRD) and atomic force microscopy (AFM) analyses showed a distinct reduction in both crystallite and grain sizes with decreasing pulse width, along with significant improvements in surface morphology refinement and film compactness. Hall effect measurements revealed a transition from n-type to p-type conductivity with decreasing pulse width, demonstrating increased hole concentration and reduced carrier mobility attributed to grain boundary scattering. Furthermore, current-voltage (I-V) characteristics demonstrated improved photoconductivity under illumination, with the most pronounced enhancement observed in samples prepared using longer pulse durations. Gas sensing measurements for NO2 and H2S revealed enhanced sensitivity, improved response/recovery characteristics at 250 °C, with optimal performance achieved in films deposited using shorter pulse durations. This improvement is attributed to their larger surface area and higher density of active adsorption sites. Our results demonstrate a clear relationship between laser pulse parameters and the functional properties of Al2O3/AgO films, providing valuable insights for optimizing deposition processes to develop advanced gas sensors.

摘要

本研究考察了激光脉冲持续时间对采用脉冲激光沉积（PLD）法在玻璃衬底上沉积的Al2O3/AgO薄膜的结构、形态、光学和气体传感特性的影响。通过光学透镜的改进实现了10、8和6纳秒的脉冲持续时间，以控制能量密度和激光光斑尺寸。X射线衍射（XRD）和原子力显微镜（AFM）分析表明，随着脉冲宽度的减小，微晶尺寸和晶粒尺寸均明显减小，同时表面形态细化和薄膜致密性有显著改善。霍尔效应测量表明，随着脉冲宽度的减小，导电类型从n型转变为p型，这表明由于晶界散射，空穴浓度增加，载流子迁移率降低。此外，电流-电压（I-V）特性表明，在光照下光导率有所提高，在使用较长脉冲持续时间制备的样品中观察到最明显的增强。对NO2和H2S的气敏测量表明，灵敏度提高，在250°C时响应/恢复特性得到改善，在使用较短脉冲持续时间沉积的薄膜中实现了最佳性能。这种改善归因于它们较大的表面积和更高密度的活性吸附位点。我们的结果表明激光脉冲参数与Al2O3/AgO薄膜的功能特性之间存在明确的关系，为优化沉积工艺以开发先进的气体传感器提供了有价值的见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/8932ebcc0348/sensors-25-05836-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/211c702201a8/sensors-25-05836-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/534a48041f8f/sensors-25-05836-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/c7b6978d8cc9/sensors-25-05836-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/d4c80067fa89/sensors-25-05836-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/99a34368657c/sensors-25-05836-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/f0bc29e99354/sensors-25-05836-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/1d4653a49655/sensors-25-05836-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/bb503fab2201/sensors-25-05836-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/02fe1184a5cf/sensors-25-05836-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/8932ebcc0348/sensors-25-05836-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/211c702201a8/sensors-25-05836-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/534a48041f8f/sensors-25-05836-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/c7b6978d8cc9/sensors-25-05836-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/d4c80067fa89/sensors-25-05836-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/99a34368657c/sensors-25-05836-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/f0bc29e99354/sensors-25-05836-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/1d4653a49655/sensors-25-05836-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/bb503fab2201/sensors-25-05836-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/02fe1184a5cf/sensors-25-05836-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33fb/12473392/8932ebcc0348/sensors-25-05836-g010.jpg

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