Wagner B
Fraunhofer Institute for Silicon Technology (ISiT), Berlin, Germany.
Endosc Surg Allied Technol. 1995 Aug;3(4):204-9.
The state of the art in microsystem design and fabrication is reviewed. The focus is on silicon micromachining, which uses the equipment and processes of IC-technology to produce highly miniaturized, three-dimensional structures, sensors and actuators for various biomedical applications. The micro components can be integrated into surgical instruments, catheters and implants. Thus new functions and a higher level of intelligence are created. Portable microsystems are being developed for chemical analysis and biomedical monitoring. The cultivation and investigation of live cells on chip substrates offers encouraging perspectives for the future.
本文综述了微系统设计与制造的最新技术。重点是硅微加工，它利用集成电路技术的设备和工艺来生产高度微型化的三维结构、传感器和执行器，用于各种生物医学应用。这些微组件可以集成到手术器械、导管和植入物中。从而创造了新的功能和更高的智能水平。正在开发用于化学分析和生物医学监测的便携式微系统。在芯片基板上培养和研究活细胞为未来提供了令人鼓舞的前景。
