Pawley J
Zoology Department, University of Wisconsin-madison 53706, USA.
Scanning. 1997 Aug;19(5):324-36.
This article traces the important milestones in the development of high-resolution, field-emission, scanning electron microscopes (SEM). Such instruments are now capable of producing images of the surfaces of biological specimens that rival, in terms of resolution and contrast, those produced by conventional transmission electron microscopy (TEM). Even though one of the first instruments to produce a useful transmission electron microscope image was, in fact, an early scanning microscope, TEM reached its full potential for biological imaging almost 30 years sooner than did SEM. The main reason for this slow rate of development is the dependence of any scanning technique on source brightness. The only suitable electron source was the field-emission source, originally developed in the 1930's. Making this into a stable and reliable electron source for microscopy required many technical barriers to be overcome. An additional delay may have been caused by the great success that attended the introduction of early SEM instruments. These instruments which employed heated, tungsten hairpin cathodes, were inexpensive and reliable, but they that were also far from optimal in terms of optical performance. Their market success may have engendered the sense of inertia and complacency that further delayed the introduction of low aberrations objective lenses and field-emission sources for almost 20 years after they were first introduced to electron microscopy. In addition, the fact that these early SEMs accustomed users to operating with a much higher beam voltage than was either necessary or wise, lead many to assume that the SEM was incapable of producing high-resolution images of biological surfaces. This left them open to fascination with newer ahd slower techniques that, on balance, were less suitable than optimized SEM for most of their imaging needs. In parallel to these developments in instrumentation, major improvements were also made in the way that the specimen surface was prepared before placing it into the vacuum and radiation environment of the microscope.
本文追溯了高分辨率场发射扫描电子显微镜(SEM)发展过程中的重要里程碑。如今,这类仪器所生成的生物样本表面图像,在分辨率和对比度方面可与传统透射电子显微镜(TEM)所生成的图像相媲美。尽管事实上最早产生有用透射电子显微镜图像的仪器之一是早期的扫描显微镜,但TEM在生物成像方面达到其全部潜力比SEM早了近30年。发展速度缓慢的主要原因是任何扫描技术都依赖于源亮度。唯一合适的电子源是20世纪30年代最初研发的场发射源。要将其制成用于显微镜的稳定可靠的电子源,需要克服许多技术障碍。早期SEM仪器的成功引入可能也造成了额外的延迟。这些仪器采用加热的钨发夹形阴极,价格低廉且可靠,但在光学性能方面远非最佳。它们在市场上的成功可能导致了一种惯性和自满情绪,使得低像差物镜和场发射源在首次引入电子显微镜后近20年都未能得到进一步应用。此外,这些早期的SEM使用户习惯了在比必要或合理电压高得多的束电压下操作,这使得许多人认为SEM无法生成生物表面的高分辨率图像。这使他们沉迷于更新且更慢的技术,而总体而言,这些技术对于大多数成像需求来说不如优化后的SEM适用。与仪器方面的这些发展并行的是,在将样本表面放入显微镜的真空和辐射环境之前的制备方式上也取得了重大改进。