Statham PJ
Oxford Instruments Microanalysis Group, Halifax Road, High Wycombe, Bucks HP12 3SE, UK
Microsc Microanal. 1998 Nov;4(6):605-615. doi: 10.1017/s1431927698980588.
: As Si(Li) detector technology has matured, many of the fundamental problems have been addressed in the competition among manufacturers and there is now an expectation, implied by many textbooks, that all energy-dispersive X-ray (EDX) detectors are made and will perform in the same way. Although there has been some convergence in Si(Li) systems and these are still the most common, manufacturing recipes still differ and there are many alternative EDX devices, such as microcalorimeters and room temperature detectors, that have both advantages and disadvantages over Si(Li). Rather than emphasizing differences in technologies, performance measures should reveal benefits relevant to the intended application. The instrument is inevitably going to be a "black box" of integrated components; this article reviews some of the methods that have been applied and introduces some new techniques that can be used to assess performance without resorting to complex software or sophisticated mathematical algorithms. Sensitivity, resolution, artefacts, and stability are discussed with particular application to compositional analysis using electron beam excitation of X-rays in the 100-eV to 10-keV energy region.
随着硅锂（Si(Li)）探测器技术的成熟，制造商之间的竞争解决了许多基本问题，现在许多教科书暗示人们期望所有能量色散X射线（EDX）探测器的制造方式和性能表现都相同。尽管Si(Li)系统已经有了一些趋同性，并且它们仍然是最常见的，但制造工艺仍然存在差异，还有许多替代的EDX设备，如微热量计和室温探测器，与Si(Li)相比各有优缺点。性能指标不应强调技术差异，而应揭示与预期应用相关的优势。该仪器不可避免地会成为一个集成组件的“黑匣子”；本文回顾了一些已应用的方法，并介绍了一些可用于评估性能的新技术，而无需借助复杂的软件或精密的数学算法。本文特别针对在100电子伏特至10千电子伏特能量区域使用电子束激发X射线进行成分分析的情况，讨论了灵敏度、分辨率、伪像和稳定性。
