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从高分辨率透射电子显微镜(HRTEM)图像测量晶体厚度和晶体倾斜度以及校正其影响的方法。

Measurement of crystal thickness and crystal tilt from HRTEM images and a way to correct for their effects.

作者信息

Hovmöller S, Zou X

机构信息

Structural Chemistry, Stockholm University, S-106 91 Stockholm, Sweden.

出版信息

Microsc Res Tech. 1999 Aug 1;46(3):147-59. doi: 10.1002/(SICI)1097-0029(19990801)46:3<147::AID-JEMT1>3.0.CO;2-1.

DOI:10.1002/(SICI)1097-0029(19990801)46:3<147::AID-JEMT1>3.0.CO;2-1
PMID:10420172
Abstract

The effects of thickness and tilt angle are studied numerically on experimental high-resolution transmission electron microscope (HRTEM) images of a wedge-shaped metal oxide crystal. For sufficiently thin and well-aligned crystals, the amplitudes and phases of the Fourier transforms of the HRTEM images are essentially the same as the crystallographic structure factors. For tilted crystals, the changes of amplitudes and phases as a function of increased thickness and tilt angle can be described by a simple model. A method is presented by which the local thickness can be determined from one HRTEM image and one convergent-beam electron diffraction pattern from the same crystal. It is also shown how the projected potential can be reconstructed from HRTEM images of tilted crystals, disclosing the crystal structure, even from quite thick (>20 nm) samples.

摘要

针对楔形金属氧化物晶体的实验性高分辨率透射电子显微镜(HRTEM)图像,对厚度和倾斜角的影响进行了数值研究。对于足够薄且取向良好的晶体,HRTEM图像傅里叶变换的振幅和相位与晶体结构因子基本相同。对于倾斜晶体,振幅和相位随厚度增加和倾斜角的变化可用一个简单模型描述。本文提出了一种方法,可根据同一晶体的一张HRTEM图像和一张会聚束电子衍射图样确定局部厚度。还展示了如何从倾斜晶体的HRTEM图像重建投影势,即使对于相当厚(>20 nm)的样品也能揭示晶体结构。

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