Yasui H, Hirose Y, Awazu K, Iwaki M
Kanazawa University, Kakuma-machi, Kanazawa, 920-1192, Ishikawa, Japan
Colloids Surf B Biointerfaces. 2000 Dec 30;19(3):291-295. doi: 10.1016/s0927-7765(00)00168-5.
A study has been made on the formation and the properties of boron carbonnitride (BCN) thin films. The BCN films were produced by ion beam assisted deposition, in which boron and carbon were deposited by electron beam heating and nitrogen was supplied by ion implantation simultaneously. The mechanical properties of BCN films were measured using a ultra micro hardness tester and a friction tester. The atomic ratio and the structure of BCN thin films were estimated by means of X-ray photoelectron spectroscopy, laser Raman spectroscopy and Fourier transform infrared spectroscopy. As preliminary results, it was found that the BCN films are higher in hardness and lower in friction coefficient than diamond-like carbon (DLC) films. The mechanical properties are discussed with the relation of surface composition and structure.
对硼碳氮（BCN）薄膜的形成及其性能进行了研究。BCN薄膜通过离子束辅助沉积制备，其中硼和碳通过电子束加热沉积，同时通过离子注入供应氮。使用超微硬度测试仪和摩擦测试仪测量BCN薄膜的力学性能。通过X射线光电子能谱、激光拉曼光谱和傅里叶变换红外光谱估算BCN薄膜的原子比和结构。作为初步结果，发现BCN薄膜比类金刚石碳（DLC）薄膜硬度更高且摩擦系数更低。结合表面成分和结构的关系对力学性能进行了讨论。
