Yang Y Z, Tian J M, Tian J T, Chen Z Q
Beijing Fine Ceramics Laboratory, State Key Laboratory of New Ceramics and Fine Processing, Institute of Nuclear Energy Technology, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, PRChina.
J Biomed Mater Res. 2001 Jun 5;55(3):442-4. doi: 10.1002/1097-4636(20010605)55:3<442::aid-jbm1034>3.0.co;2-i.
We modified Ti surfaces by implantation of amino (NH(2+)) groups at 10(16) and 10(17) cm(-2). The implanted surfaces were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning Auger electron spectroscopy (AES), and second ion mass spectroscopy (SIMS). The experimental results showed that the implanted Ti specimens were covered by a dominant hydrocarbon overlayer due to contamination and the surface oxide layer of implanted specimens became thicker. XPS, AES, and SIMS depth profiles showed that implanted elements had a typical ion implantation distribution and that titanium nitride (TiN) was formed.
我们通过以10¹⁶和10¹⁷ cm⁻²的剂量注入氨基（NH₂⁺）基团对钛表面进行了改性。通过X射线衍射（XRD）、X射线光电子能谱（XPS）、扫描俄歇电子能谱（AES）和二次离子质谱（SIMS）对注入后的表面进行了表征。实验结果表明，由于污染，注入后的钛试样被一层主要的碳氢化合物覆盖层所覆盖，且注入试样的表面氧化层变厚。XPS、AES和SIMS深度剖析表明，注入元素具有典型的离子注入分布，并且形成了氮化钛（TiN）。
