Simulation of atomic-scale high-angle annular dark field scanning transmission electron microscopy images.

Image simulations for high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) based on the Bethe's eigen-value method are presented. The effects of aperture size and defocus of a probe-forming lens, both of which determine the shape of the probe, and the effect of the distortion, influencing the Bloch wave field on atomic columns channelled by electrons, on the HAADF-image intensity are discussed in terms of dynamical effect. These effects are illustrated by our experimental atomic-scale HAADF-STEM images, detected in a detector range of 50-110 mrad. It is emphasized that the image simulations are indispensable for quantification of experimental HAADF-STEM images and as such provide a valuable compositional analysis for every atomic column along the incident beam.