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双旋转轮廓石英谐振器。

Doubly rotated contoured quartz resonators.

作者信息

Sinha B K

机构信息

Schlumberger-Doll Research, Ridgefield, CT 06877-4108, USA.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2001 Sep;48(5):1162-80. doi: 10.1109/58.949730.

DOI:10.1109/58.949730
PMID:11570746
Abstract

Doubly rotated contoured quartz resonators are used in the design of temperature-compensated stable clocks and dual-mode sensors for simultaneous measurements of pressure and temperature. The design of these devices is facilitated by models that can predict frequency spectra associated with the three thickness modes and temperature and stress-induced frequency changes as a function of crystalline orientation. The Stevens-Tiersten technique for the analysis of the C-mode of a doubly rotated contoured quartz resonator is extended to include the other two thickness modes. Computational results for harmonic and anharmonic overtones of all three thickness modes of such resonators help in optimizing the radius of curvature of the contour and electrode shape for suppression of unwanted modes and prevention of activity dips. The temperature and stress-induced changes in thickness-mode resonator frequencies are calculated from a perturbation technique for small dynamic fields superposed on a static bias. The static bias refers to either a temperature or stress-induced static deformation of the resonator plate. Phenomenological models are also used for calculating the temperature and stress-induced changes in resonant frequencies as a function of crystalline orientation. Results for the SBTC-cut quartz plate with a spherical convex contour of 260 mm indicate that normal trapping occurs for the third (n = 3) and fifth (n = 5) harmonic of the A-mode, the fundamental (n = 1) and third (n = 3) harmonic of the B-mode, and the fundamental (n = 1) and fifth (n = 5) harmonic of the C-mode.

摘要

双旋转轮廓石英谐振器用于设计温度补偿稳定时钟和双模传感器,以同时测量压力和温度。这些器件的设计借助于模型,这些模型可以预测与三种厚度模式相关的频谱以及温度和应力引起的频率变化与晶体取向的函数关系。用于分析双旋转轮廓石英谐振器C模式的史蒂文斯-蒂尔斯坦技术被扩展到包括其他两种厚度模式。此类谐振器所有三种厚度模式的谐波和非谐波泛音的计算结果有助于优化轮廓的曲率半径和电极形状,以抑制不需要的模式并防止活性下降。厚度模式谐振器频率的温度和应力引起的变化是通过对叠加在静态偏置上的小动态场的微扰技术计算得出的。静态偏置是指谐振器板的温度或应力引起的静态变形。唯象模型也用于计算谐振频率的温度和应力引起的变化与晶体取向的函数关系。具有260毫米球形凸轮廓的SBTC切割石英板的结果表明,对于A模式的第三(n = 3)和第五(n = 5)谐波、B模式的基波(n = 1)和第三(n = 3)谐波以及C模式的基波(n = 1)和第五(n = 5)谐波,会出现正常俘获。

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