Besson R J, Boy J J, Glotin B, Jinzaki Y, Sinha B, Valdois M
Ecole Nat. Superieure de Mecanique des Microtech., Besancon.
IEEE Trans Ultrason Ferroelectr Freq Control. 1993;40(5):584-91. doi: 10.1109/58.238112.
The development of a dual-mode thickness-shear quartz pressure sensor to meet the demanding performance requirements of oil-field applications is discussed. The objective was to develop a sensor with an operating pressure range of 0-103.42 MPa (0.15 000 lb/in(2)), a temperature range of -10 to +175 degrees C, a pressure calibration accuracy of 6894.8 Pa (1 lb/in(2)), and resolution of 68.95 Pa (0.01 lb/in(2)) with 1-s counter gate time. Doubly rotated cuts with piezoelectric coupling to both the C-modes of vibration were investigated. A theoretical study and general design considerations in the development of such sensors are described. Experimental results were obtained for two sensor designs: one uses a cylindrical design with the SBTC-cut, and the other, called SPA, is a special resonator design vibrating around 5 MHz without any activity dips. Pressure sensitivity of approximately 145 Hz/MPa (1 Hz/lb/in(2)) at 175 degrees C is obtained. Laboratory evaluation of the static and dynamic performances is discussed for the prototypes based on the SPA design.
讨论了一种双模式厚度剪切石英压力传感器的开发，以满足油田应用苛刻的性能要求。目标是开发一种传感器，其工作压力范围为0至103.42兆帕（0.15至15000磅/平方英寸），温度范围为-10至+175摄氏度，压力校准精度为6894.8帕（1磅/平方英寸），在1秒计数门时间下分辨率为68.95帕（0.01磅/平方英寸）。研究了与两种C模式振动都有压电耦合的双旋转切割。描述了此类传感器开发中的理论研究和一般设计考虑因素。获得了两种传感器设计的实验结果：一种采用SBTC切割的圆柱形设计，另一种称为SPA，是一种在5兆赫兹左右振动且无任何活性下降的特殊谐振器设计。在175摄氏度时获得了约145赫兹/兆帕（1赫兹/磅/平方英寸）的压力灵敏度。讨论了基于SPA设计的原型的静态和动态性能的实验室评估。
