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采用分子化学方法在锗锡体系中合成硅基红外半导体。

Synthesis of silicon-based infrared semiconductors in the Ge-Sn system using molecular chemistry methods.

作者信息

Taraci J, Zollner S, McCartney M R, Menendez J, Santana-Aranda M A, Smith D J, Haaland A, Tutukin A V, Gundersen G, Wolf G, Kouvetakis J

机构信息

Department of Chemistry, Arizona State University, Tempe, AZ 85287, USA.

出版信息

J Am Chem Soc. 2001 Nov 7;123(44):10980-7. doi: 10.1021/ja0115058.

DOI:10.1021/ja0115058
PMID:11686702
Abstract

Growth reactions based on a newly developed deuterium-stabilized Sn hydride [(Ph)SnD(3)] with Ge(2)H(6) produce a new family of Ge-Sn semiconductors with tunable band gaps and potential applications in high-speed, high-efficiency infrared optoelectronics. Metastable diamond-cubic films of Ge(1-x)Sn(x) alloys are created by chemical vapor deposition at 350 degrees C on Si(100). These exhibit unprecedented thermal stability and superior crystallinity despite the 17% lattice mismatch between the constituent materials. The composition, crystal structure, electronic structure, and optical properties of these materials are characterized by Rutherford backscattering, high-resolution electron microscopy, and X-ray diffraction, as well as Raman, IR, and spectroscopic ellipsometry. Electron diffraction reveals monocrystalline and perfectly epitaxial layers with lattice constants intermediate between those of Ge and alpha-Sn. X-ray diffraction in the theta-2theta mode shows well-defined peaks corresponding to random alloys, and in-plane rocking scans of the (004) reflection confirm a tightly aligned spread of the crystal mosaics. RBS ion-channeling including angular scans confirm that Sn occupies substitutional lattice sites and also provide evidence of local ordering of the elements with increasing Sn concentration. The Raman spectra show bands corresponding to Ge-Ge and Sn-Ge vibrations with frequencies consistent with random tetrahedral alloys. Resonance Raman and ellipsometry spectra indicate a band-gap reduction relative to Ge. The IR transmission spectra suggest that the band gap decreases monotonically with increasing Sn fraction. The synthesis, characterization, and gas-phase electron diffraction structure of (Ph)SnD(3) are also reported.

摘要

基于新开发的氘稳定氢化锡[(Ph)SnD(3)]与Ge(2)H(6)的生长反应产生了一系列新的Ge-Sn半导体,其带隙可调,在高速、高效红外光电子学中具有潜在应用。通过在350℃下在Si(100)上进行化学气相沉积制备了Ge(1-x)Sn(x)合金的亚稳金刚石立方薄膜。尽管组成材料之间存在17%的晶格失配,但这些薄膜表现出前所未有的热稳定性和优异的结晶度。这些材料的组成、晶体结构、电子结构和光学性质通过卢瑟福背散射、高分辨率电子显微镜、X射线衍射以及拉曼、红外和光谱椭偏仪进行表征。电子衍射显示具有介于Ge和α-Sn晶格常数之间的晶格常数的单晶和完美外延层。θ-2θ模式下的X射线衍射显示对应于随机合金的明确定义的峰,并且(004)反射的面内摇摆扫描证实了晶体镶嵌的紧密排列扩展。包括角度扫描的RBS离子通道证实Sn占据替代晶格位置,并且还提供了随着Sn浓度增加元素局部有序化的证据。拉曼光谱显示对应于Ge-Ge和Sn-Ge振动的带,其频率与随机四面体合金一致。共振拉曼光谱和椭偏光谱表明相对于Ge带隙减小。红外透射光谱表明带隙随着Sn分数的增加单调减小。还报道了(Ph)SnD(3)的合成、表征和气相电子衍射结构。

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