Ngoi B K, Venkatakrishnan K, Sivakumar N R
PEN Centre, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore.
Appl Opt. 2001 Jul 1;40(19):3211-4. doi: 10.1364/ao.40.003211.
A modification of phase-shifting interferometry is proposed for microsurface profiling of flat surfaces under vibrating conditions. With this technique the required phase shift, achieved by quarter-wave plates and polarizers, is free of errors associated with motion. A nearly common optical-path configuration is achieved, and the effect of environment is reduced. The effect of environment on the optical system is also studied. Moreover, the measurement of phase is instantaneous, which increases the versatility of this technique to measure vibrating objects. Experiments were carried out on a smooth mirror surface excited with high-frequency vibrations, and the technique was found to be immune to vibrations of both high and low frequency.
提出了一种相移干涉测量法的改进方法，用于在振动条件下对平面进行微表面轮廓测量。采用该技术，通过四分之一波片和偏振器实现所需的相移，该相移不存在与运动相关的误差。实现了几乎相同的光路配置，并减少了环境的影响。还研究了环境对光学系统的影响。此外，相位测量是即时的，这增加了该技术测量振动物体的通用性。在受高频振动激励的光滑镜面上进行了实验，结果发现该技术对高频和低频振动均具有免疫性。
