Wolfling Shay, Lanzmann Emmanuel, Ben-Yosef Nissim, Arieli Yoel
Nano-Or Technologies, Lod, Israel.
Appl Opt. 2006 Apr 20;45(12):2586-96. doi: 10.1364/ao.45.002586.
Common-path imaging interferometers offer some advantages over other interferometers, such as insensitivity to vibrations and the ability to be attached to any optical system to analyze an imaged wavefront. We introduce the spatial-phase-shift imaging interferometry technique for surface measurements and wavefront analysis in which different parts of the wavefront undergo certain manipulations in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing interferometry methods. We present the mathematical algorithm for reconstructing the wavefront from the interference patterns and detail the optical considerations for implementing the optical system. We implemented the spatial phase shift into a working system and used it to measure a variety of objects. Measurement results and comparison with other measurement methods indicate that this approach improves measurement accuracy with respect to existing quantitative phase-measurement methods.
共光路成像干涉仪相对于其他干涉仪具有一些优势，比如对振动不敏感，并且能够连接到任何光学系统以分析成像波前。我们介绍用于表面测量和波前分析的空间相移成像干涉测量技术，在该技术中，波前的不同部分在沿光轴的特定平面内经历特定操作。这些操作取代了现有干涉测量方法中的参考光束相移。我们给出了从干涉图样重建波前的数学算法，并详细说明了实现该光学系统的光学考量。我们将空间相移应用到一个实际工作系统中，并使用它来测量各种物体。测量结果以及与其他测量方法的比较表明，相对于现有的定量相位测量方法，这种方法提高了测量精度。
