McDonald J Cooper, Chabinyc Michael L, Metallo Steven J, Anderson Janelle R, Stroock Abraham D, Whitesides George M
Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA.
Anal Chem. 2002 Apr 1;74(7):1537-45. doi: 10.1021/ac010938q.
A solid-object printer was used to produce masters for the fabrication of microfluidic devices in poly(dimethylsiloxane) (PDMS). The printer provides an alternative to photolithography for applications where features of > 250 microm are needed. Solid-object printing is capable of delivering objects that have dimensions as large as 250 x 190 x 200 mm (x, y, z) with feature sizes that can range from 10 cm to 250 microm. The user designs a device in 3-D in a CAD program, and the CAD file is used by the printer to fabricate a master directly without the need for a mask. The printer can produce complex structures, including multilevel features, in one unattended printing. The masters are robust and inexpensive and can be fabricated rapidly. Once a master was obtained, a PDMS replica was fabricated by molding against it and used to fabricate a microfluidic device. The capabilities of this method are demonstrated by fabricating devices that contain multilevel and tall features, devices that cover a large area (approximately 150 cm2), and devices that contain nonintersecting, crossing channels.
使用固体物体打印机制作母模,用于制造聚二甲基硅氧烷(PDMS)微流控装置。对于需要大于250微米特征尺寸的应用,该打印机为光刻提供了一种替代方法。固体物体打印能够制造尺寸高达250×190×200毫米(x、y、z)的物体,特征尺寸范围从10厘米到250微米。用户在CAD程序中以三维方式设计装置,打印机使用CAD文件直接制造母模,无需掩膜。该打印机可以在一次无人值守打印中制造包括多层特征在内的复杂结构。母模坚固且成本低廉,并且可以快速制造。一旦获得母模,通过对其进行模制来制造PDMS复制品,并用于制造微流控装置。通过制造包含多层和高大特征的装置、覆盖大面积(约150平方厘米)的装置以及包含不相交、交叉通道的装置,展示了此方法的能力。