Usami M, Iwamoto T, Fukasawa R, Tani M, Watanabe M, Sakai K
TOCHIGI Nikon Corporation, 770 Midori, Ohtawara, Tochigi 324-8625, Japan.
Phys Med Biol. 2002 Nov 7;47(21):3749-53. doi: 10.1088/0031-9155/47/21/311.
We have developed a real-time THz imaging system based on the two-dimensional (2D) electro-optic (EO) sampling technique. Employing the 2D EO-sampling technique, we can obtain THz images using a CCD camera at a video rate of up to 30 frames per second. A spatial resolution of 1.4 mm was achieved. This resolution was reasonably close to the theoretical limit determined by diffraction. We observed not only static objects but also moving ones. To acquire spectroscopic information, time-domain images were collected. By processing these images on a computer, we can obtain spectroscopic images. Spectroscopy for silicon wafers was demonstrated.
我们基于二维(2D)电光(EO)采样技术开发了一种实时太赫兹成像系统。采用二维电光采样技术,我们能够使用电荷耦合器件(CCD)相机以高达每秒30帧的视频速率获取太赫兹图像。实现了1.4毫米的空间分辨率。该分辨率与由衍射确定的理论极限相当接近。我们不仅观察到了静态物体,还观察到了移动的物体。为了获取光谱信息,收集了时域图像。通过在计算机上处理这些图像,我们可以获得光谱图像。展示了对硅片的光谱分析。