Kumar Francis J, Lim Leong-Chew, Lim Siak Piang, Lee Kwok Hong
Microfine Materials Technologies Pte. Ltd., The Spire, 10 Bukit Batok Crescent #06-02, Singapore 658079.
IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Mar;50(3):203-9. doi: 10.1109/tuffc.2003.1193612.
A nondestructive quality evaluation and control procedure for large-area, (001)-cut PZN-8%PT wafers is described. The crystals were grown by the flux technique engineered to promote (001) layer growth of the crystals. The wafers were sliced parallel to the (001) layer growth plane. Curie temperature (Tc) variations, measured with matching arrays of dot electrodes (of 5.0 mm in center-to-center spacing), were found to be better than +/- 4.0 degrees C both within wafers and from wafer to wafer. After selective dicing to give final wafers of narrower Tc distributions (e.g., +/- 3.0 degrees C or better), the wafers were coated with complete electrodes and poled at room temperature at 0.7-0.9 kV/mm. Typical overall properties of the poled wafers were: K3T = 5,200 (+/- 10% from wafer to wafer), tan delta < 0.01 (all wafers), and kt = 0.55 (+/- 5%) (all percentage variations are in relative percentages). Then, the distributions of K3S, tan delta, and kt were measured by the array dot electrode technique. The variations in K3S (hence K3T) and kt within individual wafers were found to be within +/- 10% and +/- 5%, respectively. The dielectric loss values, measured at 1 kHz, were consistently low, being < 0.01 throughout the wafers. The kt values determined by the dot electrodes were found to be about 5% smaller than those obtained with the complete electrodes, which can be attributed to an increase in capacitance ratio due to the partial electroding. The k33 values, deduced using the relation K3S approximately (1 - k33(2))K3T, from the mean K3S and overall K3T values, average 0.94 (+/- 2%). The present work shows that the distribution of Tc within wafers can be used as a convenient check for the uniformity in composition and electromechanical properties of PZN-8%PT single crystal wafers. Our results show that, to control deltaK3T and deltakt within individual wafer to < or = 10% and 5%, respectively, the variation in Tc within the wafer should be kept within +/- 3.0 degrees C or better.
描述了一种用于大面积(001)切割的PZN - 8%PT晶片的无损质量评估和控制程序。晶体通过旨在促进晶体(001)层生长的助熔剂技术生长。晶片平行于(001)层生长平面切片。使用中心间距为5.0 mm的匹配点电极阵列测量的居里温度(Tc)变化,发现在晶片内部以及晶片之间均优于±4.0℃。在进行选择性切割以得到Tc分布更窄(例如,±3.0℃或更好)的最终晶片后,在晶片上涂覆完整电极并在室温下以0.7 - 0.9 kV/mm进行极化。极化晶片的典型总体性能为:K3T = 5200(晶片之间±10%),tanδ < 0.01(所有晶片),以及kt = 0.55(±5%)(所有百分比变化均为相对百分比)。然后,通过阵列点电极技术测量K3S、tanδ和kt的分布。发现单个晶片内K3S(因此K3T)和kt的变化分别在±10%和±5%以内。在1 kHz下测量的介电损耗值始终很低,整个晶片内均< 0.01。发现由点电极确定的kt值比用完整电极获得的值小约5%,这可归因于部分电极化导致的电容比增加。使用关系K3S ≈ (1 - k33²)K3T,根据平均K3S和总体K3T值推导出的k33值平均为0.94(±2%)。目前的工作表明,晶片内Tc的分布可作为检查PZN - 8%PT单晶晶片成分和机电性能均匀性的便捷方法。我们的结果表明,要将单个晶片内的ΔK3T和Δkt分别控制在≤10%和5%以内,晶片内Tc的变化应保持在±3.0℃或更好。