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PZN-7%PT 单晶高频成角针状超声换能器的设计与制造

Design and fabrication of PZN-7%PT single crystal high frequency angled needle ultrasound transducers.

作者信息

Zhou Qifa, Wu Dawei, Jin Jing, Hu Chang-hong, Xu Xiaochen, Williams Jay, Cannata Jonathan M, Lim Leongchew, Shung K Kirk

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(6):1394-9. doi: 10.1109/TUFFC.2008.804.

Abstract

A high-frequency angled needle ultrasound transducer with an aperture size of 0.4 x 0.56 mm2 was fabricated using a lead zinc niobate-lead titanate (PZN- 7%PT) single crystal as the active piezoelectric material. The single crystal was bonded to a conductive silver particle matching layer and a conductive epoxy backing material through direct contact curing. A parylene outer matching layer was formed by vapor deposition. Angled needle probe configuration was achieved by dicing at 45 degrees to the single crystal poling direction to satisfy a clinical request for blood flow measurement in the posterior portion of the eye. The electrical impedance magnitude and phase of the transducer were 42 Omega and -63 degrees , respectively. The measured center frequency and the fractional bandwidth at -6 dB were 43 MHz and 45%, respectively. The two-way insertion loss was approximately 17 dB. Wire phantom imaging using fabricated PZN-7%PT single crystal transducers was obtained and spatial resolutions were assessed.

摘要

采用铌锌酸铅-钛酸铅(PZN-7%PT)单晶作为有源压电材料,制作了孔径尺寸为0.4×0.56平方毫米的高频成角针状超声换能器。通过直接接触固化将单晶与导电银颗粒匹配层和导电环氧树脂背衬材料粘结在一起。通过气相沉积形成聚对二甲苯外匹配层。通过在与单晶极化方向成45度角的位置进行切割,实现了成角针状探头配置,以满足眼部后部血流测量的临床需求。该换能器的电阻抗幅值和相位分别为42Ω和-63度。测得的中心频率和-6dB处的分数带宽分别为43MHz和45%。双向插入损耗约为17dB。利用制作的PZN-7%PT单晶换能器获得了线阵仿体成像,并评估了空间分辨率。

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